Patents by Inventor Yuannan LI

Yuannan LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200391337
    Abstract: A grinding apparatus includes a first chuck table that has a porous holding surface corresponding to a first wafer and holds the first wafer, a second chuck table that has a porous holding surface corresponding to a second wafer different from the first wafer in size or shape and holds the second wafer, and a grinding unit that grinds, by a grinding wheel, the first wafer sucked and held by the first chuck table positioned at the grinding position or the second wafer sucked and held by the second chuck table positioned at the grinding position.
    Type: Application
    Filed: June 9, 2020
    Publication date: December 17, 2020
    Inventors: Tomotaka TABUCHI, Yuannan LI, Kazuma SEKIYA