Abstract: A method for drying a wafer includes a cleaning step, a liquid replacing step, and a drying step. In the cleaning step, a workpiece located in a process chamber is cleaned with a cleaning solution. In the liquid replacing step, a drying agent in gas phase is compressed to convert into liquid phase, and the drying agent in liquid phase is introduced to the process chamber to replace the cleaning solution. In the drying step, the cleaning solution is discharged out of the process chamber, and then the drying agent is converted from liquid phase back to gas phase and is discharged out of the process chamber.

Abstract: An image detection system includes a rod body having a detection terminal and a control terminal, and at least one fixing unit fixed at the rod body; a movement module, provided between the detection terminal and the control terminal; and a detection module, provided at the detection terminal of the rod body, the detection module comprising a plurality of imaging units, a detection unit and a control unit, wherein the imaging units are arranged at the detection terminal in a manner of surrounding the rod body, the imaging units obtain images inside the hole or the tube, the movement module moves the body inside the hole or the tube, and the detection unit obtains size and position information of a detection target, thereby achieving detection and measurement of damaged holes or cracks inside a hole or a tube, or conditions inside the hole or the tube.

Abstract: A mounting apparatus for mounting a data storage device that has a protrusion protruding from a sidewall thereof includes a bracket for holding the data storage device, a mounting member, a locking member, and a resilient member. The bracket includes a first side wall. The first side wall defines a slideway, for receiving the protrusion of the data storage device to slide therealong. The mounting member is mounted to the first side wall. The locking member slidably mounted to the mounting member includes a projecting part adjacent the slideway of the bracket, for locating the protrusion of the data storage device. The resilient member is located between the mounting member and the locking member.

Abstract: A mounting apparatus for mounting a data storage device that has a protrusion protruding from a sidewall thereof includes a bracket for holding the data storage device, a mounting member, a locking member, and a resilient member. The bracket includes a first side wall. The first side wall defines a slideway, for receiving the protrusion of the data storage device to slide therealong. The mounting member is mounted to the first side wall. The locking member slidably mounted to the mounting member includes a projecting part adjacent the slideway of the bracket, for locating the protrusion of the data storage device. The resilient member is located between the mounting member and the locking member.