Abstract: Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.

Abstract: Improved impact proof capability of a silicon microphone sensing element is achieved with a stopper element that limits the maximum vibration of moveable parts. The stopper has a lower anchor portion and upper finger portion that is elevated a certain distance above the diaphragm and overhangs the outer edges of the perforated plates. The stopper is formed on a stack consisting of a lower substrate, a middle dielectric layer, and an upper membrane layer. There is a back hole in the substrate and an air gap in the dielectric layer to allow sound to impinge on the diaphragm. The number of fingers and composition of the stopper is variable. Optionally, the stopper has a center support design and is formed on a center anchor within an opening in the diaphragm. An upper finger region overhangs the diaphragm near the center opening and thereby prevents breakage due to large vibrations.

Abstract: Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.

Abstract: Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.

Abstract: Improved impact proof capability of a silicon microphone sensing element is achieved with a stopper element that limits the maximum vibration of moveable parts. The stopper has a lower anchor portion and upper finger portion that is elevated a certain distance above the diaphragm and overhangs the outer edges of the perforated plates. The stopper is formed on a stack consisting of a lower substrate, a middle dielectric layer, and an upper membrane layer. There is a back hole in the substrate and an air gap in the dielectric layer to allow sound to impinge on the diaphragm. The number of fingers and composition of the stopper is variable. Optionally, the stopper has a center support design and is formed on a center anchor within an opening in the diaphragm.

Abstract: Disposable units in current use for performing PCR are limited by their heat block ramping rates and by the thermal diffusion delay time through the plastic wall as well as by the sample itself. This limitation has been overcome by forming a disposable plastic chip using a simple deformation process wherein one or more plastic sheets are caused, through hydrostatic pressure, to conform to the surface of a suitable mold. After a given disposable chip has been filled with liquid samples, it is brought into close contact with an array of heating blocks that seals each sample within its own chamber, allowing each sample to then be heat treated as desired.

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract: An accelerometer design is described. It operates by measuring a change in capacitance when one plate is fixed and one is mobile (free to accelerate). Unlike prior art designs where such changes are caused by variations in the plate separation distance, in the design of the present invention the plate separation distance is fixed, it being the effective plate area that changes with acceleration. A key feature is that the basic unit is a pair of capacitors. The fixed plates in each case are at the same relative height but the mobile plates are offset relative to the fixed plates, one mobile plate somewhat higher than its fixed plate with the other mobile plate being somewhat lower. Then, when the mobile plates move (in the same direction), one capacitor increases in value while the other decreases by the same amount. This differential design renders the device insensitive to sources of systematic error such as temperature changes. A process for manufacturing the design is described.

Abstract: A process has been described which makes use of polysilicon beam as the structural material instead of single crystal silicon for the fabrication of MEMS sensors/actuators. The invention describes the process for fabricating suspended polysilicon beams by using deep trenches etched into silicon substrate as a kind of a mould to form polysilicon beams. The polysilicon beams are subsequently released by isotropically etching away the silicon surrounding the polysilicon beams. This results in free standing polysilicon members, which form the MEMS structures. In addition to the general process, three approaches to making electrical contact to the beams are presented.