Abstract: A focus compensation method and apparatus thereof are provided. The focusing compensation method includes steps of: (S11) providing an exposure lens set; (S12) providing an object, measuring line-widths of the object at points of line segments along an axial direction by different focusing conditions, to obtain measured values, and obtaining at least one line-width curve from the measured values; and (S13) calibrating a focusing operation of the exposure lens set according to the at least one line-width curve. Line-widths of a product are measured, and fed back to an exposure machine to calibrate the focusing operations of the exposure machine, thereby improving the focusing accuracy of the exposure machine.

Abstract: A focus compensation method and apparatus thereof are provided. The focusing compensation method includes steps of: (S11) providing an exposure lens set; (S12) providing an object, measuring line-widths of the object at points of line segments along an axial direction by different focusing conditions, to obtain measured values, and obtaining at least one line-width curve from the measured values; and (S13) calibrating a focusing operation of the exposure lens set according to the at least one line-width curve. Line-widths of a product are measured, and fed back to an exposure machine to calibrate the focusing operations of the exposure machine, thereby improving the focusing accuracy of the exposure machine.

Abstract: A method and a device for improving exposure accuracy are provided. After an exposure area is defined on a substrate, a plurality of exposure points from the exposure area are acquired to obtain a set of the exposure points, and then a plurality of exposure offset values corresponding to the exposure points in the set of the exposure points are detected respectively, to obtain a set of the exposure offset values. Then, based on the set of the exposure offset values, the exposure points corresponding to each of the exposure offset values are corrected.