Patents by Inventor Yue J. Li

Yue J. Li has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Providing a dynamic sampling plan for integrated metrology
    Patent number: 7577537
    Abstract: A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Grant
    Filed: March 18, 2008
    Date of Patent: August 18, 2009
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
    Publication number: 20080167830
    Abstract: A computer program product and system of providing a dynamic sampling plan for integrated metrology is disclosed. The computer program product may include a computer readable medium that includes a computer readable program, wherein the computer readable program when executed on a computer causes the computer to: model a sampling plan for use with a factory level advanced processing control (FL-APC) system; receive a request for a sampling plan; and send a recommended sampling plan, based upon the request and the modeling. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Application
    Filed: March 18, 2008
    Publication date: July 10, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • Method and system of providing a dynamic sampling plan for integrated metrology
    Patent number: 7398172
    Abstract: A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: July 8, 2008
    Assignee: International Business Machines Corporation
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll
  • METHOD AND SYSTEM OF PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
    Publication number: 20070282549
    Abstract: A method and system of providing a dynamic sampling plan for integrated metrology is disclosed. The method may include modeling a sampling plan for use with a factory level advanced processing control (FL-APC) system and sending a recommended sampling plan, in response to receiving a request for a sampling plan, wherein the recommended sampling plan is based upon the modeling and the request. The recommended sampling plan may be sent to an equipment interface (EI) and on to a tool for implementation in a manufacturing environment.
    Type: Application
    Filed: May 31, 2006
    Publication date: December 6, 2007
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Gary W. Behm, Emily M. Hwang, Yue J. Li, Teresita Q. Magtoto, Derek C. Stoll