Abstract: A processing apparatus for overlay shift includes a storage unit and a control unit, and is applicable to a semiconductor wafer with several inspection regions. Each of the inspection regions has several sets of overlay marks for inspection. One set of overlay marks includes an original alignment mark without any overlay shift, and several split alignment marks with predetermined overlay shifts arranged near the original alignment mark. The original after-etch inspection (AEI) overlay data of the inspection regions is stored in the storage unit. The after-develop inspection (ADI) overlay data of the original alignment mark and the split alignment marks are compared with the original AEI overlay data by the control unit, thereby acquiring ADI pre-bias data of the original alignment mark and the split alignment marks. The control unit determines whether an overlay shift compensation is performed according to the acquired ADI pre-bias data.

Abstract: A virtual metrology method based on convolutional autoencoder and transfer learning includes performing a data alignment operation, a modeling operation and a calculating operation. The data alignment operation includes performing a data-length adjusting operation onto a plurality of sets of process data. The modeling operation includes classifying paired data and unpaired process data; creating a pre-trained model by using the unpaired process data, and then inputting the paired data to the pre-trained model to create a virtual metrology model based on convolutional autoencoder. The virtual metrology model based on convolutional autoencoder includes at least one convolutional neural network model. In addition, the calculating operation includes executing one of a predicting step and a transfer learning step according to whether the actual metrology data is obtained, thereby calculating one of a phase-one virtual metrology value and a phase-two virtual metrology value.

Abstract: The invention provides a detection system and detection circuit for detecting health status of backup power supply module. The detection circuit comprises a boost converter, a controller, and at least one backup power supply module. The boost converter receives an input voltage to generate a first high voltage. When the detection circuit is operated in a detection state, the boost converter is inhibited to output the first high voltage, the backup power supply module can execute a discharging process to provide a discharged energy to a load device, the controller detects a time at which a discharged potential of the backup power supply module is dropped from a first voltage to a second voltage to obtain a discharged time detection value. The controller can know a health status of the backup power supply module by a comparison between the discharged time detection value and a discharged time threshold value.

Abstract: The invention provides a detection system and detection circuit for detecting health status of backup power supply module. The detection circuit comprises a boost converter, a controller, and at least one backup power supply module. The boost converter receives an input voltage to generate a first high voltage. When the detection circuit is operated in a detection state, the boost converter is inhibited to output the first high voltage, the backup power supply module can execute a discharging process to provide a discharged energy to a load device, the controller detects a time at which a discharged potential of the backup power supply module is dropped from a first voltage to a second voltage to obtain a discharged time detection value. The controller can know a health status of the backup power supply module by a comparison between the discharged time detection value and a discharged time threshold value.

Abstract: The invention provides a flash memory device, which comprises a controller, a plurality of flash memories, a switcher, a power supply module, and a voltage detection circuit. When the system voltage is higher than a voltage threshold, the voltage detection circuit outputs an enable signal to the switcher to turn on the switcher, the system voltage is provided to the power supply module, the power supply module executes a charging process by the system voltage, and generates an output voltage based on the system voltage. The output voltage is an operating voltage of the controller and the flash memories. When the system voltage is lower than the voltage threshold, the voltage detection circuit outputs a disable signal to the switcher to turn off the switcher, the system voltage is inhibited to provide to the power supply module, the power module generates the output voltage by executing a discharging process.