Patents by Inventor Yueh-Hsun Tsou

Yueh-Hsun Tsou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming an undercut microstructure
    Patent number: 8377320
    Abstract: A method of forming an undercut microstructure includes: forming an etch mask on a top surface of a substrate; forming, on a top surface of the etch mask, an ion implantation mask having a top surface that is smaller than the top surface of the etch mask and that does not extend beyond the top surface of the etch mask; ion implanting the substrate in the presence of the etch mask and the ion implantation mask so that a damaged region is generated at a depth below an area of the surface that is not masked by the ion implantation mask; and etching the surface of the substrate until the damaged region is removed.
    Type: Grant
    Filed: July 23, 2010
    Date of Patent: February 19, 2013
    Assignee: National Taipei University of Technology
    Inventors: Tzyy-Jiann Wang, Yueh-Hsun Tsou
  • METHOD OF FORMING AN UNDERCUT MICROSTRUCTURE
    Publication number: 20110250397
    Abstract: A method of forming an undercut microstructure includes: forming an etch mask on a top surface of a substrate; forming, on a top surface of the etch mask, an ion implantation mask having a top surface that is smaller than the top surface of the etch mask and that does not extend beyond the top surface of the etch mask; ion implanting the substrate in the presence of the etch mask and the ion implantation mask so that a damaged region is generated at a depth below an area of the surface that is not masked by the ion implantation mask; and etching the surface of the substrate until the damaged region is removed.
    Type: Application
    Filed: July 23, 2010
    Publication date: October 13, 2011
    Applicant: National Taipei University of Technology
    Inventors: Tzyy-Jiann WANG, Yueh-Hsun TSOU