Abstract: An airflow heating module for an equipment front-end module, including: a first perforated plate including a first plurality of holes used as airflow inlets; a second perforated plate including a second plurality of holes used as airflow outlets; a plurality of heaters provided between the first and the second perforated plates; and an active air intake device provided on the first perforated plate to accelerate airflow flowing through the first plurality of holes and past the plurality of heaters, such that the airflow carries heat generated by the heaters and passes through the second plurality of holes. Each of the heaters includes a heating tube and a fin. The fin is formed helically around the heating tube and attached thereto.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: An optical system is provided. The optical system includes a first movable portion, a fixed portion, a first driving assembly, and a first sensing assembly. The first movable portion is used for connecting to an optical assembly having a main axis. The first movable portion is movable relative to the fixed portion. The first driving assembly is used for driving the first movable portion to move relative to the fixed portion. The first sensing assembly is used for sensing the movement of the first movable portion relative to the fixed portion.

Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a movable portion, a fixed portion, a driving assembly, and an assist assembly. The movable portion is used for connecting to an optical element having a main axis. The movable portion is movable relative to the fixed portion. The driving assembly drives the movable portion to move relative to the fixed portion. The assist assembly limits the movement of the movable portion relative to the fixed portion.

Abstract: An optical member driving mechanism is provided. The optical member driving mechanism is configured to hold an optical member and drive the optical member to move. The optical member driving mechanism includes a first movable portion, a fixed portion, and a driving assembly. The first movable portion is movable relative to the fixed portion. The driving assembly is configured to drive the first movable portion to move relative to the fixed portion.

Abstract: A driving mechanism is provided, including a fixed portion, a movable portion, a driving assembly and a connecting element. The movable portion may move relative to the fixed portion and is used for holding an optical module. The driving assembly moves the movable portion relative to the fixed portion. The connecting element is movably connected to the fixed portion and the movable portion.

Abstract: An optical element driving mechanism is provided, including a movable portion, a fixed portion, a driving assembly, and a support element. The movable portion is used for connecting to an optical element having a main axis. The movable portion is movable relative to the fixed portion. The driving assembly is used for driving the movable portion to move relative to the fixed portion. The movable portion moves relative to the fixed portion through the support element.

Abstract: An optical element driving mechanism is provided, including a fixed portion, a movable portion, a driving assembly, and a stopping assembly. The movable portion is movably connected to the fixed portion, wherein the movable portion is used for connecting to an optical element having a main axis. The driving assembly is disposed on the fixed portion or the movable portion, and the driving assembly is used for driving the movable portion to move relative to the fixed portion. The stopping assembly is connected to the movable portion and the fixed portion.

Abstract: An optical system is provided. The optical system includes a first moveable unit, an optical module, an affixed base and a first driving module. The optical module includes an optical axis, wherein the optical module is connected to the first moveable unit. The first moveable unit is adapted to be moved relative to the affixed base. The first driving module is adapted to drive the first moveable unit to move relative to the affixed base.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: An optical element driving mechanism is provided. The optical element driving mechanism includes a movable portion, a fixed portion, a driving assembly, and a stopping assembly. The movable portion is used for connecting to an optical element having a main axis. The movable portion is movable relative to the fixed portion. The driving assembly is disposed on the fixed portion or the movable portion to move the movable portion relative to the fixed portion. The stopping assembly connects to the movable portion and the fixed portion to limit the range of motion of the movable portion relative to the fixed portion.

Abstract: An optical member driving mechanism is provided. The optical member driving mechanism includes a first movable portion, a fixed portion, a first driving assembly, and a plurality of second guiding members. The first movable portion is configured to connect an optical member. The optical member is used for adjusting a direction of a light from an incident direction to an outgoing direction. The first movable portion can move relative to the fixed portion. The first driving assembly is configured to drive the first movable portion to move relative to the fixed portion. The second guiding members include a first ball, a second ball, and a third ball. The first ball, the second ball, and the third ball are disposed in a plane that is perpendicular to the incident direction.

Abstract: An optical system is provided, including a housing, an optical element, a first movable part, a driving assembly, and a temperature adjusting module. The optical element is disposed on the housing. The first movable part is movably connected to the housing. The driving assembly is configured to drive the first movable part to move relative to the housing. The temperature adjusting module is disposed in the housing for adjusting the temperature of the optical system.

Abstract: An optical element driving mechanism is provided and includes a first movable part, a fixed assembly and a first driving assembly. The first movable part includes an optical element, and the first movable part is movable relative to the fixed assembly. The first driving assembly is configured to drive the first movable part to move relative to the fixed assembly. The fixed assembly includes a first base and a second base arranged along a first axis, and the first movable part moves along the first axis.

Abstract: A control method of a driving mechanism is provided, including: the driving mechanism provides a first electrical signal from a control assembly to the driving mechanism to move the movable portion into an initial position relative to the fixed portion, wherein the control assembly includes a control unit and a position sensing unit; the status signal of an inertia sensing unit is read; the control unit sends the status signal to the control unit to calculate a target position; the control unit provides a second electrical signal to the driving assembly according to the target position for driving the driving assembly; a position signal is sent from the position sensing unit to the control unit; the control unit provides a third electric signal to the driving assembly to drive the driving assembly according the position signal.

Abstract: A driving mechanism is provided, including a base, a movable unit, and a movable part. The movable unit is movably disposed on the base and connected to an optical element. The movable part is movably disposed on the base and forms a passage. When the movable part moves from the first position to the second position relative to the base, the movable unit can slide relative to the base from its initial position through the passage to a closed position.

Abstract: An optical member driving mechanism is provided. The optical member driving mechanism includes a movable portion and a fixed portion. The movable portion includes a holder for holding an optical member with an optical axis. The movable portion is movable relative to the fixed portion. The fixed portion has a housing and a base. The housing is disposed on the base, and includes a top surface and a side surface. The top surface extends in a direction that is parallel to the optical axis. The side surface extends from an edge of the top surface in a direction that is not parallel to the optical axis. The side surface has a rectangular opening.

Abstract: An optical component driving mechanism is provided. The optical component driving mechanism includes a first movable portion, a fixed portion, and a first driving assembly. The fixed portion includes a first opening. The first movable portion is movable relative to the fixed portion. The first driving assembly is configured to drive the first movable portion to move relative to the fixed portion.

Abstract: An optical component driving mechanism is provided. The optical component driving mechanism includes a first holder, a frame, and a first driving assembly. The first holder is configured to connect the first optical component. The frame includes a first accommodating space for accommodating the first holder. The first holder is movable relative to the frame. The first driving assembly is configured to drive the first holder to move relative to the frame.

Abstract: An optical element driving mechanism is provided in the present disclosure, including a first movable portion, a fixed portion, a first driving assembly and a first supporting assembly. The first movable portion is connected to a first optical element. The first movable portion is movable relative to the fixed portion. The first driving assembly drives the first movable portion to move relative to the fixed portion in a first dimension. The first supporting assembly is disposed between the first movable portion and the fixed portion. The first movable portion moves relative to the fixed portion via the first supporting assembly.