Abstract: A fluorescent optical system and a fluorescent image inspection system are provided. The fluorescent optical system includes a platform, at least one light source device, and at least one first filter. The platform is configured for placement of a sample to be inspected. The at least one light source device is configured to illuminate the sample to be inspected, so that the sample to be inspected is stimulated to generate a fluorescent light. The at least one first filter is correspondingly arranged in an optical path of the at least one light source device, so that an excitation light passes through the at least one first filter. An incident angle is formed between the excitation light and the platform, and the incident angle is less than 90 degrees.

Abstract: A profile measuring method used to measure a profile of an object-under-test includes the following steps. A light source, a light-transmissive projection film, and an image capturing device are provided, where the light-transmissive projection film is located between the light source and the image capturing device. The object-under-test is placed between the light source and the light-transmissive projection film, and a light beam is provided toward the light-transmissive projection film by the light source, to form an object-under-test projection of the object-under-test on the light-transmissive projection film. An image of the object-under-test projection is captured by the image capturing device, to obtain a projection size of the object-under-test projection. A measuring size of the object-under-test is calculated according to the projection size of the object-under-test projection. In addition, a profile measuring apparatus and a deformation detecting apparatus are also provided.

Abstract: A profile measuring method used to measure a profile of an object-under-test includes the following steps. A light source, a light-transmissive projection film, and an image capturing device are provided, where the light-transmissive projection film is located between the light source and the image capturing device. The object-under-test is placed between the light source and the light-transmissive projection film, and a light beam is provided toward the light-transmissive projection film by the light source, to form an object-under-test projection of the object-under-test on the light-transmissive projection film. An image of the object-under-test projection is captured by the image capturing device, to obtain a projection size of the object-under-test projection. A measuring size of the object-under-test is calculated according to the projection size of the object-under-test projection. In addition, a profile measuring apparatus and a deformation detecting apparatus are also provided.