Abstract: The present disclosure describes a method of forming low thermal budget dielectrics in semiconductor devices.

Abstract: A magnetic tunnel junction (MTJ) memory cell and a metallic etch mask portion are formed over a substrate. At least one dielectric etch stop layer is deposited over the metallic etch mask portion, and a via-level dielectric layer is deposited over the at least one dielectric etch stop layer. A via cavity may be etched through the via-level dielectric layer, and a top surface of the at least one dielectric etch stop layer is physically exposed. The via cavity may be vertically extended by removing portions of the at least one dielectric etch stop layer and the metallic etch mask portion. A contact via structure is formed directly on a top surface of the top electrode in the via cavity to provide a low-resistance contact to the top electrode.

Abstract: A fin field effect transistor (FinFET) device structure is provided. The FinFET device structure includes a plurality of fin structures above a substrate, an isolation structure over the substrate and between the fin structures, and a gate structure formed over the fin structure. The FinFET device structure includes a source/drain (S/D) structure over the fin structure, and the S/D structure is adjacent to the gate structure. The FinFET device structure also includes a metal silicide layer over the S/D structure, and the metal silicide layer is in contact with the isolation structure.

Abstract: The present disclosure describes a method of forming low thermal budget dielectrics in semiconductor devices. The method includes forming, on a substrate, first and second fin structures with an opening in between, filling the opening with a flowable isolation material, treating the flowable isolation material with a plasma, and removing a portion of the plasma-treated flowable isolation material between the first and second fin structures.

Abstract: A fluid delivering system receives a fluid from a supplying device, transfers the fluid to an operational device and then dumps the used fluid into an extraction device. The fluid delivering system has a main pipeline system and at least a secondary pipeline system. Each pipeline system uses a first flow valve to control the back flow of fluid to a first flow controller, a second flow valve to protect a pressure gauge and a third flow valve to control the flow of fluid to a pressure controller. Through the relative positioning and the concerted actions of these three valves, any malfunctioning in the fluid delivering system can be detected quickly so that on-going processing operation can stop immediately to minimize product damages.