Patents by Inventor Yugo Shibata
Yugo Shibata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9791018Abstract: A vibration isolation apparatus includes a support unit that elastically supports an object to a mounting surface, a measurement sensor that measures a displacement of the object relative to the mounting surface, a drive unit that drives the object, and a storage unit. The storage unit stores data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a support unit and that corresponds to the displacement. The drive unit drives the object in accordance with the displacement of the object and the data.Type: GrantFiled: June 30, 2014Date of Patent: October 17, 2017Assignee: Canon Kabushiki KaishaInventor: Yugo Shibata
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Publication number: 20150014507Abstract: A vibration isolation apparatus includes a support unit that elastically supports an object to a mounting surface, a measurement sensor that measures a displacement of the object relative to the mounting surface, a drive unit that drives the object, and a storage unit. The storage unit stores data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a support unit and that corresponds to the displacement. The drive unit drives the object in accordance with the displacement of the object and the data.Type: ApplicationFiled: June 30, 2014Publication date: January 15, 2015Inventor: Yugo Shibata
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Patent number: 8786831Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.Type: GrantFiled: June 22, 2011Date of Patent: July 22, 2014Assignee: Canon Kabushiki KaishaInventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
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Publication number: 20110248578Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.Type: ApplicationFiled: June 22, 2011Publication date: October 13, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
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Patent number: 8031328Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.Type: GrantFiled: January 26, 2006Date of Patent: October 4, 2011Assignee: Canon Kabushiki KaishaInventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
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Patent number: 7932646Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.Type: GrantFiled: January 8, 2008Date of Patent: April 26, 2011Assignee: Canon Kabushiki KaishaInventor: Yugo Shibata
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Patent number: 7880864Abstract: This invention relates to a stage apparatus including a first stage, a second stage mounted on the first stage, a first actuator which drives the first stage in a first direction, and a second actuator which drives the second stage such that the second stage moves relative to the first stage. The stage apparatus also includes a first unit including a first movable magnet arranged at an end of the first stage in the first direction, and a first stationary magnet which faces the first movable magnet and generates a repulsive force against the first movable magnet. The stage apparatus also includes a second unit including a second movable magnet arranged at the two ends of the second stage in the first direction, and a second stationary magnet which faces the second movable magnet and generates a repulsive force against the second movable magnet.Type: GrantFiled: December 26, 2007Date of Patent: February 1, 2011Assignee: Canon Kabusiki KaishaInventor: Yugo Shibata
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Patent number: 7804207Abstract: This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.Type: GrantFiled: October 18, 2007Date of Patent: September 28, 2010Assignee: Canon Kabushiki KaishaInventor: Yugo Shibata
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Publication number: 20080169708Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.Type: ApplicationFiled: January 8, 2008Publication date: July 17, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Yugo Shibata
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Publication number: 20080158539Abstract: This invention relates to a stage apparatus including a first stage, a second stage mounted on the first stage, a first actuator which drives the first stage in a first direction, and a second actuator which drives the second stage such that the second stage moves relative to the first stage. The stage apparatus also includes a first unit including a first movable magnet arranged at an end of the first stage in the first direction, and a first stationary magnet which faces the first movable magnet and generates a repulsive force against the first movable magnet. The stage apparatus also includes a second unit including a second movable magnet arranged at the two ends of the second stage in the first direction, and a second stationary magnet which faces the second movable magnet and generates a repulsive force against the second movable magnet.Type: ApplicationFiled: December 26, 2007Publication date: July 3, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Yugo Shibata
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Patent number: 7375346Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.Type: GrantFiled: November 7, 2006Date of Patent: May 20, 2008Assignee: Canon Kabushiki KaishaInventor: Yugo Shibata
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Publication number: 20080100149Abstract: This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.Type: ApplicationFiled: October 18, 2007Publication date: May 1, 2008Applicant: CANON KABUSHIKI KAISHAInventor: Yugo Shibata
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Patent number: 7330093Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback controlled, whereas the acceleration electromagnet is feedforward controlled.Type: GrantFiled: October 11, 2005Date of Patent: February 12, 2008Assignee: Canon Kabushiki KaishaInventors: Toshiya Asano, Yugo Shibata
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Patent number: 7282874Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.Type: GrantFiled: January 27, 2006Date of Patent: October 16, 2007Assignee: Canon Kabushiki KaishaInventors: Yugo Shibata, Atsushi Kimura
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Publication number: 20070063149Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.Type: ApplicationFiled: November 7, 2006Publication date: March 22, 2007Applicant: CANON KABUSHIKI KAISHAInventor: Yugo Shibata
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Patent number: 7193493Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback-controlled, whereas the acceleration electromagnet is feedforward-controlled.Type: GrantFiled: September 26, 2003Date of Patent: March 20, 2007Assignee: Canon Kabushiki KaishaInventors: Toshiya Asano, Yugo Shibata
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Patent number: 7157722Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.Type: GrantFiled: March 21, 2005Date of Patent: January 2, 2007Assignee: Canon Kabushiki KaishaInventor: Yugo Shibata
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Publication number: 20060175993Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.Type: ApplicationFiled: January 27, 2006Publication date: August 10, 2006Inventors: Yugo Shibata, Atsushi Kimura
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Publication number: 20060175910Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.Type: ApplicationFiled: January 26, 2006Publication date: August 10, 2006Applicant: Canon Kabushiki KaishaInventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
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Publication number: 20060028310Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback controlled, whereas the acceleration electromagnet is feedforward controlled.Type: ApplicationFiled: October 11, 2005Publication date: February 9, 2006Applicant: CANON KABUSHIKI KAISHAInventors: Toshiya Asano, Yugo Shibata