Patents by Inventor Yugo Shibata

Yugo Shibata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9791018
    Abstract: A vibration isolation apparatus includes a support unit that elastically supports an object to a mounting surface, a measurement sensor that measures a displacement of the object relative to the mounting surface, a drive unit that drives the object, and a storage unit. The storage unit stores data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a support unit and that corresponds to the displacement. The drive unit drives the object in accordance with the displacement of the object and the data.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: October 17, 2017
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yugo Shibata
  • Publication number: 20150014507
    Abstract: A vibration isolation apparatus includes a support unit that elastically supports an object to a mounting surface, a measurement sensor that measures a displacement of the object relative to the mounting surface, a drive unit that drives the object, and a storage unit. The storage unit stores data indicating a relationship between the displacement of the object and information that indicates a non-linear force produced by an elastic element including a support unit and that corresponds to the displacement. The drive unit drives the object in accordance with the displacement of the object and the data.
    Type: Application
    Filed: June 30, 2014
    Publication date: January 15, 2015
    Inventor: Yugo Shibata
  • Patent number: 8786831
    Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: June 22, 2011
    Date of Patent: July 22, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
  • Publication number: 20110248578
    Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
    Type: Application
    Filed: June 22, 2011
    Publication date: October 13, 2011
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
  • Patent number: 8031328
    Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: January 26, 2006
    Date of Patent: October 4, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
  • Patent number: 7932646
    Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.
    Type: Grant
    Filed: January 8, 2008
    Date of Patent: April 26, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yugo Shibata
  • Patent number: 7880864
    Abstract: This invention relates to a stage apparatus including a first stage, a second stage mounted on the first stage, a first actuator which drives the first stage in a first direction, and a second actuator which drives the second stage such that the second stage moves relative to the first stage. The stage apparatus also includes a first unit including a first movable magnet arranged at an end of the first stage in the first direction, and a first stationary magnet which faces the first movable magnet and generates a repulsive force against the first movable magnet. The stage apparatus also includes a second unit including a second movable magnet arranged at the two ends of the second stage in the first direction, and a second stationary magnet which faces the second movable magnet and generates a repulsive force against the second movable magnet.
    Type: Grant
    Filed: December 26, 2007
    Date of Patent: February 1, 2011
    Assignee: Canon Kabusiki Kaisha
    Inventor: Yugo Shibata
  • Patent number: 7804207
    Abstract: This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.
    Type: Grant
    Filed: October 18, 2007
    Date of Patent: September 28, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yugo Shibata
  • Publication number: 20080169708
    Abstract: A device includes a stage, a force applying unit configured to apply a magnetically repulsive force to the stage, the force applying unit including a first magnet provided at the stage, and a second magnet provided at an end of a movement stroke of the stage so as to face the first magnet, a driving unit configured to drive the stage within the movement stroke, a magnetic-flux reinforcement unit configured to reinforce magnetic flux of the second magnet, and a magnetic shield configured to shield the magnetic flux of the second magnet.
    Type: Application
    Filed: January 8, 2008
    Publication date: July 17, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yugo Shibata
  • Publication number: 20080158539
    Abstract: This invention relates to a stage apparatus including a first stage, a second stage mounted on the first stage, a first actuator which drives the first stage in a first direction, and a second actuator which drives the second stage such that the second stage moves relative to the first stage. The stage apparatus also includes a first unit including a first movable magnet arranged at an end of the first stage in the first direction, and a first stationary magnet which faces the first movable magnet and generates a repulsive force against the first movable magnet. The stage apparatus also includes a second unit including a second movable magnet arranged at the two ends of the second stage in the first direction, and a second stationary magnet which faces the second movable magnet and generates a repulsive force against the second movable magnet.
    Type: Application
    Filed: December 26, 2007
    Publication date: July 3, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yugo Shibata
  • Patent number: 7375346
    Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
    Type: Grant
    Filed: November 7, 2006
    Date of Patent: May 20, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yugo Shibata
  • Publication number: 20080100149
    Abstract: This invention provides a positioning apparatus which improves the throughput by accelerating a stage in a shorter period of time while ensuring a fine positioning characteristic. A movable element is arranged on the side of a stage while a stator is arranged on the side of a base guide such that a pair of magnets of the same polarity face each other at each edge of the stroke region of the stage. This generates a repulsion force which acts against the thrust of the stage and corresponds to the facing area of the pair of magnets of the same polarity. The positioning apparatus further includes a large-thrust linear motor. The large-thrust linear motor assists the repulsion force by applying a thrust exceeding the repulsion force to the stage to increase the facing area of the pair of magnets of the same polarity.
    Type: Application
    Filed: October 18, 2007
    Publication date: May 1, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yugo Shibata
  • Patent number: 7330093
    Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback controlled, whereas the acceleration electromagnet is feedforward controlled.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: February 12, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Toshiya Asano, Yugo Shibata
  • Patent number: 7282874
    Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.
    Type: Grant
    Filed: January 27, 2006
    Date of Patent: October 16, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yugo Shibata, Atsushi Kimura
  • Publication number: 20070063149
    Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
    Type: Application
    Filed: November 7, 2006
    Publication date: March 22, 2007
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Yugo Shibata
  • Patent number: 7193493
    Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback-controlled, whereas the acceleration electromagnet is feedforward-controlled.
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: March 20, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventors: Toshiya Asano, Yugo Shibata
  • Patent number: 7157722
    Abstract: In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
    Type: Grant
    Filed: March 21, 2005
    Date of Patent: January 2, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Yugo Shibata
  • Publication number: 20060175993
    Abstract: An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.
    Type: Application
    Filed: January 27, 2006
    Publication date: August 10, 2006
    Inventors: Yugo Shibata, Atsushi Kimura
  • Publication number: 20060175910
    Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
    Type: Application
    Filed: January 26, 2006
    Publication date: August 10, 2006
    Applicant: Canon Kabushiki Kaisha
    Inventors: Tosiya Asano, Yugo Shibata, Atsushi Kimura
  • Publication number: 20060028310
    Abstract: An alignment apparatus moves an X-Y slider together with X and Y beams. Electromagnetic guides (electromagnetic mechanisms) are interposed between the X-Y slider, the X beam, and the Y beam. The electromagnetic guides include alignment and acceleration electromagnets attached to the X-Y slider, and targets attached to the X and Y beams. The alignment electromagnet is feedback controlled, whereas the acceleration electromagnet is feedforward controlled.
    Type: Application
    Filed: October 11, 2005
    Publication date: February 9, 2006
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Toshiya Asano, Yugo Shibata