Abstract: A method of fabricating an optical element comprises: providing a substrate (1, 50) of a transparent material in which is to be formed a plurality of birefringent nanostructures spaced apart in plane substantially parallel to a surface of the substrate in a first direction (2) by a distance X and in a second direction (3) by a distance Y; generating from the output of a source (20) of femtosecond laser pulses a laser beam group comprising a plurality of focused seeding beams (44) having a circular polarisation and spaced apart along a line by the distance X and a focused writing beam (26) having a non-circular polarisation and spaced apart from one of the seeding beams by the distance Y or the distance X; directing the laser beam group onto the surface of the substrate at a first position and applying one or more femtosecond laser pulses from each beam to corresponding volumes in the substrate; repeatedly translating the laser beam group relative to the substrate parallel to the line of seeding beams and alon