Patents by Inventor Yuhei Otomo

Yuhei Otomo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220366092
    Abstract: An evaluation apparatus includes a processor that performs operations including reading a simulation parameter of a topography simulator and first range information or second range information that are associated with each other, the simulation parameter being calculated to cause the topography simulator output topography information of a processed target object that is to be obtained by processing the unprocessed target object under a predetermined processing condition, providing topography information of a new unprocessed target object and the simulation parameter to the topography simulator to cause the topography simulator to predict topography information of a new processed target object that is processed under the predetermined processing condition, and outputting a result of comparing the topography information of the new unprocessed target object with the first range information or a result of comparing the topography information of the new processed target object with the second range information.
    Type: Application
    Filed: May 13, 2022
    Publication date: November 17, 2022
    Inventors: Daishiro Akiyama, Yusuke Ogawa, Tsuyoshi Mizuuchi, Takahiko Kato, Tomoki Komatsu, Kosuke Nakago, Yuhei Otomo, Kohji Liu