Patents by Inventor Yuhya Ueki

Yuhya Ueki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering apparatus
    Patent number: 10170288
    Abstract: There is provided a sputtering apparatus in which a holding body holding a substrate by facing a target in a processing chamber is covered by a deposition preventive plate including a substrate retainer for covering a peripheral edge part of the substrate, and a thin film made of metal is deposited on a surface of the substrate exposed to an inside of the deposition preventive plate. A stopper protrusion protrudes at a portion in which the holding body and the deposition preventive plate face each other from one part to the other part, and face the holding body or the deposition preventive plate at a smaller interval than the interval between the deposition preventive plate and the substrate retainer.
    Type: Grant
    Filed: February 19, 2014
    Date of Patent: January 1, 2019
    Assignee: Sakai Display Products Corporation
    Inventors: Yuhya Ueki, Yasuhiro Wakamori
  • Sputtering Apparatus
    Publication number: 20170018412
    Abstract: There is provided a sputtering apparatus in which a holding body holding a substrate by facing a target in a processing chamber is covered by a deposition preventive plate including a substrate retainer for covering a peripheral edge part of the substrate, and a thin film made of metal is deposited on a surface of the substrate exposed to an inside of the deposition preventive plate. A stopper protrusion protrudes at a portion in which the holding body and the deposition preventive plate face each other from one part to the other part, and face the holding body or the deposition preventive plate at a smaller interval than the interval between the deposition preventive plate and the substrate retainer.
    Type: Application
    Filed: February 19, 2014
    Publication date: January 19, 2017
    Applicant: Sakai Display Products Corporation
    Inventors: Yuhya Ueki, Yasuhiro Wakamori