Abstract: Provided are a modified polybenzoxazole and a modified polybenzoxazole sheet each having small temperature dependence of its modulus of elasticity, each of which may be suitably used for forming a cleaning sheet that may be suitably used for a transfer member to be transferred in a substrate processing apparatus. Also provided is a cleaning sheet having small temperature dependence of its modulus of elasticity, including such modified polybenzoxazole sheet as a cleaning layer. Also provided is a transfer member provided with a cleaning function, including such cleaning sheet and a transfer member. The modified polybenzoxazole is a modified polybenzoxazole, including a benzoxazole ring structure and two or more amide groups, the modified polybenzoxazole having a storage modulus of elasticity at 1 Hz in a range of 0° C. to 100° C. of 200 MPa to 2,000 MPa.

Abstract: Provided is a cleaning sheet including a cleaning layer that may be suitably used for a transfer member to be transferred in a substrate processing apparatus, the cleaning sheet being capable of effectively suppressing an adsorption error. A direction from an end portion of a surface of the cleaning layer toward a center thereof when viewed from a normal direction with respect to the surface is defined as a center direction, a region occupied by a width of 10 mm from the end portion toward the center direction in the surface is defined as an end portion region, and a maximum thickness L of the cleaning layer in the normal direction in the end portion region and an average thickness T of the cleaning layer in the normal direction in a region of the cleaning layer excluding the end portion region have a relationship of L?T?5 ?m.

Abstract: Provided is a carbon nanotube composite electrode having carbon nanotubes which are firmly fixed to an electrode substrate so as to utilize the characteristics of the carbon nanotubes, and having the intrinsic electrode characteristics of carbon nanotubes. The carbon nanotube composite electrode has a surface layer containing a porous oxide material and carbon nanotubes on the surface of the electrode substrate, wherein the carbon nanotubes are generated from the porous oxide material, and at least some of the carbon nanotubes are electrically connected to the electrode substrate. The carbon nanotube composite electrode is firmly fixed to the electrode substrate, and has the intrinsic electrode characteristics of carbon nanotubes, and thus may preferably be used in applications for electrodes and the like in various electronic devices such as electrochemical sensors and batteries.

Abstract: An optical semiconductor device includes a metal lead frame including first and second plate portions, an optical semiconductor element mounted on the metal lead frame, and a reflector provided around the optical semiconductor element. A material for the reflector is an epoxy resin composition containing: (A) an epoxy resin; (B) a curing agent; (C) a white pigment; (D) an inorganic filler; and (E) at least one of a carboxylic acid and water. Components (C) and (D) are present in a total proportion of 69 to 94 wt % based on the amount of the overall epoxy resin composition, and the component (E) is present in a proportion of 4 to 23 mol % based on the total amount of the components (B) and (E). The resin composition has a higher glass transition temperature, and is excellent in moldability and blocking resistance and substantially free from warpage.

Abstract: An optical semiconductor device includes a metal lead frame including first and second plate portions, an optical semiconductor element mounted on the metal lead frame, and a reflector provided around the optical semiconductor element. A material for the reflector is an epoxy resin composition containing: (A) an epoxy resin; (B) a curing agent; (C) a white pigment; (D) an inorganic filler; and (E) at least one of a carboxylic acid and water. Components (C) and (D) are present in a total proportion of 69 to 94 wt % based on the amount of the overall epoxy resin composition, and the component (E) is present in a proportion of 4 to 23 mol % based on the total amount of the components (B) and (E). The resin composition has a higher glass transition temperature, and is excellent in moldability and blocking resistance and substantially free from warpage.

Abstract: Provided is a carbon nanotube composite electrode having carbon nanotubes which are firmly fixed to an electrode substrate so as to utilize the characteristics of the carbon nanotubes, and having the intrinsic electrode characteristics of carbon nanotubes. The carbon nanotube composite electrode has a surface layer containing a porous oxide material and carbon nanotubes on the surface of the electrode substrate, wherein the carbon nanotubes are generated from the porous oxide material, and at least some of the carbon nanotubes are electrically connected to the electrode substrate. The carbon nanotube composite electrode is firmly fixed to the electrode substrate, and has the intrinsic electrode characteristics of carbon nanotubes, and thus may preferably be used in applications for electrodes and the like in various electronic devices such as electrochemical sensors and batteries.