Abstract: Provided is a highly practical pressure vessel in which there is minimal inside diameter deformation even if openings in a center inlet/outlet part are large, and there is little pressure-induced elongation from a center to both ends.

Abstract: According to one embodiment, there is provided a chemical solution supply system including: a tank configured to store a chemical solution; a first pipe connected to the tank and configured to provide the chemical solution; a first filter unit connected to the first pipe and having a first filter configured to filter the chemical solution; a second pipe connected to the first filter unit and configured to provide the chemical solution filtered by the first filter; and a detector connected to the first pipe and configured to detect foreign matter in the chemical solution in the first pipe.

Abstract: A semiconductor manufacturing apparatus includes: a reaction chamber; a pipe connected to the reaction chamber; a vacuum pump that has an intake port and an exhaust port, and in which the intake port or the exhaust port is connected to the pipe; a first acoustic sensor provided in the pipe; and a control device including a determination unit configured to determine clogging of the pipe based on a first output of the first acoustic sensor.

Abstract: A chemical solution supply system including: a first tank that stores a first chemical solution; a first pipe that is connected to the first tank and conveys the first chemical solution; a first filter unit that is connected to the first pipe and has a first filter through which the first chemical solution is filtered; a first valve that is provided in the first pipe between the first tank and the first filter unit; a second tank that stores a second chemical solution; and a second pipe that is connected to the second tank and the first pipe between the first filter unit and the first valve.

Abstract: A particle measuring apparatus includes a light source configured to irradiate a gas with light, a first optical detection unit configured to detect an intensity of reflected light from particles contained in the gas, and configured to output a first parameter value corresponding to the intensity of the reflected light, and a storage unit that stores first data indicating corresponding relationships between first parameter values particle components. The particle measuring apparatus further includes a calculation unit configured to compare the first parameter value transmitted from the first optical detection unit with the first data transmitted from the storage unit to determine a component of the particles contained in the gas.

Abstract: A particle measuring apparatus according to an embodiment includes a first supply part that introduces first gas. A second supply part introduces second gas having been filtered. A light source irradiates mixture gas including the first gas and the second gas with light. A light detector detects reflected light from the mixture gas and measures number of particles contained in the mixture gas. A pump sucks the mixture gas.

Abstract: A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.

Abstract: A particle measuring apparatus includes a light source configured to irradiate a gas with light, a first optical detection unit configured to detect an intensity of reflected light from particles contained in the gas, and configured to output a first parameter value corresponding to the intensity of the reflected light, and a storage unit that stores first data indicating corresponding relationships between first parameter values particle components. The particle measuring apparatus further includes a calculation unit configured to compare the first parameter value transmitted from the first optical detection unit with the first data transmitted from the storage unit to determine a component of the particles contained in the gas.

Abstract: A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.

Abstract: A particle detecting apparatus has a condensing and growing unit to condense and grow a condensing component over particles contained in a gas while the gas imported through an inflow port is transported from a low temperature portion to a high temperature portion, a particle detector to detect a concentration of the particles contained in the gas discharged from an outflow port of the condensing and growing unit, a particle feeder to feed, to the inflow port of the condensing and growing unit, a test gas containing test particles whose particle diameter and the number of particles per unit volume are known, and a first determinator to determine whether a concentration of the test particles contained in the test gas detected by the particle detector has a predetermined value.

Abstract: A particle measuring apparatus according to an embodiment includes a first supply part that introduces first gas. A second supply part introduces second gas having been filtered. A light source irradiates mixture gas including the first gas and the second gas with light. A light detector detects reflected light from the mixture gas and measures number of particles contained in the mixture gas. A pump sucks the mixture gas.

Abstract: A particle supply device according to one embodiment includes a housing and a particle supplier. The housing seals a space between a substrate carry-out port provided in a FOUP and a substrate carry-in port provided at a load port of a substrate processing device. A particle supplier supplies particles to an inside of the housing.

Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

Abstract: A container for storing substrates capable of shortening the cycle time of the production, improving the production efficiency and reducing the production cost is provided. The container for storing substrates is composed of a box for accommodating the substrates, and a closure member for sealingly closing the box by tightly fixing the closure member to the opening of the box. The container for storing substrates is provided with means for temporarily storing a sealing gas and introducing the sealing gas into the box. Also, the container for storing substrates is provided with means for means for temporarily forming a low pressure space for the purpose of evacuating the gas inside of the box by transferring the gas to the low pressure space.

Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.

Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.

Abstract: A pod for storing and carrying substrates consists of a pod body and a cover. An inlet and an outlet are formed on one of the pod body and cover. The cover is tightly fitted to the pod body to close the inside of the pod body. A washing liquid is introduced into the pod through the inlet and is discharged from the pod through the outlet, thereby easily washing the inside of the pod with the pod itself serving as a washing tank. A washing cover has an inlet, an outlet, and a heater. The washing cover is attached to the pod body when washing the inside of the pod body. Further provided is a cleaning apparatus having pipes and a pump that are connected to the washing cover. The cleaning apparatus may have a table serving as the washing cover. The table is connected to pipes and a pump.

Abstract: A carrier system is constituted by a plurality of carrier units which are coupled by inter-unit couplers. Each carrier unit includes a rail for moving a carrier, a table for placing an object to be delivered or retrieved, and a coupler for joining the rail and table. An inter-unit coupler is provided at the coupler. Further, the carrier system includes a rail having two rail tracks where two carriers move without interfering with each other.