Abstract: An array substrate according to an embodiment includes a substrate having a first side and a second side, multiple control lines, multiple data lines, a first region having multiply first interconnect pads, and a second region having multiply second interconnect pads. There is at least one of a distance between the first side and a center line of the first region being longer than a distance between the first side and a center line extending in the first direction of a region including the multiple control lines electrically connected to the multiple first interconnect pads, or a distance between the second side and a center line of the second region being longer than a distance between the second side and a center line extending in the second direction of a region including the multiple data lines electrically connected to the multiple second interconnect pads.

Abstract: According to one embodiment of the invention, a radiation detector includes an array substrate including a plurality of photoelectric conversion elements, a scintillator provided on the plurality of photoelectric conversion elements, the scintillator converting an incident radiation to a fluorescence, a circuit board provided on a side of the array substrate opposite to a side on which the scintillator is provided, a flexible printed board electrically connecting a plurality of wirings provided on the array substrate and a plurality of wirings provided on the circuit board, and when viewing in an incident direction of the radiation, a semiconductor element provided on the flexible printed board, the semiconductor element being positioned below the scintillator.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.

Abstract: An array substrate according to an embodiment includes a substrate having a first side and a second side, multiple control lines, multiple data lines, a first region having multiply first interconnect pads, and a second region having multiply second interconnect pads. There is at least one of a distance between the first side and a center line of the first region being longer than a distance between the first side and a center line extending in the first direction of a region including the multiple control lines electrically connected to the multiple first interconnect pads, or a distance between the second side and a center line of the second region being longer than a distance between the second side and a center line extending in the second direction of a region including the multiple data lines electrically connected to the multiple second interconnect pads.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.

Abstract: According to the embodiment, an array substrate includes a substrate, a plurality of first wirings, a plurality of second wirings, a thin film transistor, a protective layer, and a plurality of connection parts electrically connected to each of the plurality of first wirings and the plurality of second wirings, and including a conductive material having higher corrosion resistance than a material of the plurality of first wirings and the plurality of second wirings. An end surface of the plurality of first wirings and the plurality of second wirings on peripheral side of the substrate is covered with the protective layer, and an end surface of the connection part on the peripheral side of the substrate is located at a periphery of the substrate in plan view.

Abstract: According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.