Patents by Inventor Yuichi Takenga

Yuichi Takenga has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing system, processing method, and computer program
    Publication number: 20090117259
    Abstract: The present invention provides a processing system, a processing method and a program, which can readily control a gas flow rate. A vertical-type heating apparatus 1 includes a plurality of gas supply pipes 16 to 20 each adapted for supplying a processing gas into a reaction vessel 2 configured to contain therein semiconductor wafers W. For the gas supply pipes 16 to 20, flow rate control units 21 to 25 are provided, respectively, for controlling each flow rate. In a control unit 50, processing conditions including the flow rate of the processing gas and a film thickness-flow rate-relationship model indicative of a relationship between the flow rate of the processing gas and a film thickness, are stored.
    Type: Application
    Filed: February 28, 2008
    Publication date: May 7, 2009
    Inventors: Yuki Kataoka, Tatsuya Yamaguchi, Wenling Wang, Yuichi Takenga