Patents by Inventor Yuichi Yushida

Yuichi Yushida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate Holding Device, Exposure Apparatus, and Device Manufacturing Method
    Publication number: 20070269294
    Abstract: To provide a substrate holding apparatus which can prevent a liquid from entering into a rear surface side of a substrate. A substrate holding apparatus (PH) is provided with a base material (PHB), a first holding portion (PH1) formed on the base material (PHB) for holding the substrate (P), and a second holding portion (PH2) formed on the base material (PHB) for holding a plate member (T) by surrounding the circumference of a processing substrate (P) held by the first holding portion (PH1). The second holding portion (PH2) holds the plate member (T) so as to form a second space (32) on the side of the rear surface (Tb) of the plate member (T). On the rear surface (Tb) of the plate member (T), an absorbing member (100) is arranged for absorbing the liquid (LQ) entered from a gap (A) between the substrate (P) held by the first holding portion (PH1) and the plate member (T) held by the second holding portion (PH2).
    Type: Application
    Filed: September 16, 2005
    Publication date: November 22, 2007
    Applicant: NIKON CORPORATION
    Inventors: Hiroyuki Nagasaka, Makoto Shibuta, Katsushi Nakano, Yuichi Yushida, Hiroaki Takaiwa