Patents by Inventor Yuichiro Gotoh

Yuichiro Gotoh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for classifying a defect on a semiconductor wafer
    Patent number: 5943437
    Abstract: A surface image of a semiconductor wafer having a defect is picked up as a inspection image while a surface image of a semiconductor wafer having no defect is stored in an image memory as a reference image. A density difference image between the inspection image and the reference image. By extracting the defect in wiring and non-wiring regions from the density difference image, extract images are obtained. Two luminance information for wiring and non-wiring regions are obtained from extract images. Based on the luminance information, the type of the defect is determined and a production process where the defect has occurred is detect.
    Type: Grant
    Filed: October 7, 1996
    Date of Patent: August 24, 1999
    Assignees: Kabushiki Kaisha Kobe Seiko Sho, Texas Instruments Japan Limited, KTI Semiconductor Ltd.
    Inventors: Shingo Sumie, Tsutomu Morimoto, Yuichiro Gotoh, Eiji Takahashi, Shouji Kanbe, Akira Okamoto