Patents by Inventor Yuichiro Iijima

Yuichiro Iijima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection apparatus, substrate mounting device and inspection method
    Patent number: 8723536
    Abstract: Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.
    Type: Grant
    Filed: January 14, 2011
    Date of Patent: May 13, 2014
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusuke Miyazaki, Kenji Aiko, Yuichiro Iijima, Yuichiro Kato
  • SUBSTRATE HOLDING DEVICE AND METHOD, AND INSPECTION APPARATUS AND METHOD USING THE SUBSTRATE HOLDING DEVICE AND METHOD
    Publication number: 20130154675
    Abstract: Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.
    Type: Application
    Filed: January 14, 2011
    Publication date: June 20, 2013
    Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
    Inventors: Yusuke Miyazaki, Kenji Aiko, Yuichiro Iijima, Yuichiro Kato