Abstract: There is provided a technique that includes: preparing the substrate including a silicon-containing film and a metal film composed of a metal element, which includes at least one selected from the group of tungsten, titanium, ruthenium, and molybdenum and, which are formed on a surface of the substrate; and simultaneously performing modifying the metal film and modifying the silicon-containing film by supplying reactive species, which are generated by plasma-exciting a processing gas containing hydrogen and oxygen, to the substrate.

Abstract: Provided is a technique for detecting a vehicle type and a traveling direction of a vehicle by an electromagnetic induction sensor. A sensor unit (10), which is an electromagnetic induction sensor, includes a transmission coil (TX1), a first reception coil (RX1), and a second reception coil (RX2). A magnetic field of a vehicle (90) made of steel attracts a magnetic field emitted from the transmission coil (TX1) (S1). As the vehicle (90) approaches, a state 1 indicated by the broken line changes to a state 2 indicated by the dash-dot line (S2). A reduction in induced voltage and a phase change occur with respect to the induced voltage when the first reception coil (RX1) is in the magnetic field of state 1 (when the vehicle is not detected) (S3). The differential output signals of the second reception coil RX2 and the first reception coil RX1 change according to the advancement of the vehicle and according to the unevenness of the vehicle bottom portion 92 and the metal species (S4).

Abstract: A three-dimensional shaping device shapes a three-dimensional article by irradiating a powder material with an electron beam and melting the powder material. The three-dimensional shaping device includes an electron beam emitting unit emitting the electron beam, melting the powder material in order to shape the article, and performing preliminary heating of the powder material by irradiating the powder material with the electron beam before the article is shaped. The electron beam emitting unit moves an irradiation position of the electron beam in a spiral pattern when the powder material is irradiated with the electron beam for preliminary heating.

Abstract: A rotating additive manufacturing device includes a table, a feeder, a heater, a beam source, a state information acquisition unit, and a control unit. The control unit has a stop operation unit outputting a first control signal for stopping irradiation with an electron beam due to an input of abnormal state information, and a return operation unit determining whether or not the abnormal state information is information related to a state of a powder material and outputting a second control signal for controlling at least one of rotating operation of the table, heating operation of the heater, and supplying operation of the feeder when the abnormal state information is information related to the state of the powder material.

Abstract: A powder supply device includes a hopper accommodating powder, a cylindrical roller provided below the hopper and rotatable around a rotational axis, and a wall surface storing the powder in a space between the roller and the wall surface. The powder supply device moves the powder stored between the roller and the wall surface in a rotation direction of the roller and drops the powder by the roller rotating. A plurality of groove portions extending in an axial direction are formed in a peripheral surface of the roller. At least one of the groove portions is formed such that a capacity allowing the powder to be accommodated changes in the axial direction.

Abstract: A powder feeding device includes: a hopper including a discharge port for discharging powder; and a conveyance device configured to move a conveyance surface disposed below the discharge port in a first direction and invert the conveyance surface in a front end portion. The hopper includes a front wall portion positioned on a downstream side of the discharge port in the first direction. A predetermined gap is formed between a lower end of the front wall portion and the conveyance surface. In the powder feeding device, powder deposited on the conveyance surface is conveyed in the first direction by the conveyance device with a thickness corresponding to the gap and dropped from the front end portion.

Abstract: A three-dimensional modeling device includes a table supporting a powder material and a model created from the powder material, a processing section disposed so as to face the table and obtaining the model by processing the powder material, and a rotation unit causing the table to rotate relative to the processing section around a rotary axis. The processing section has a plurality of processing units disposed around the rotary axis. The processing units supply the powder material to the table, preheat the supplied powder material, and emit an energy beam to the preheated powder material.

Abstract: A three-dimensional manufacturing apparatus includes a rotary drive unit that rotates a table around a rotation axis, a region setting unit that sets a plurality of divided regions obtained by dividing an irradiation region, a beam source that irradiates a powder material with an electron beam for each of the divided regions, and a rotation speed adjusting unit that adjusts a rotation speed of the table. An area per unit central angle of a first divided region is smaller than an area per unit central angle of a second divided region. The rotation speed adjusting unit performs adjustment so that a rotation speed of the table during a period of irradiating the first divided region with the energy beam becomes faster than a rotation speed of the table during a period of irradiating the second divided region with the energy beam.

Abstract: A three-dimensional modeling device includes a table supporting a powder material and a model created from the powder material, a processing section disposed so as to face the table and obtaining the model by processing the powder material, and a rotation unit causing the table to rotate relative to the processing section around a rotary axis. The processing section has a plurality of processing units disposed around the rotary axis. The processing units supply the powder material to the table, preheat the supplied powder material, and emit an energy beam to the preheated powder material.

Abstract: Provided is a technique for detecting a vehicle type and a traveling direction of a vehicle by an electromagnetic induction sensor. A sensor unit (10), which is an electromagnetic induction sensor, includes a transmission coil (TX1), a first reception coil (RX1), and a second reception coil (RX2). A magnetic field of a vehicle (90) made of steel attracts a magnetic field emitted from the transmission coil (TX1) (S1). As the vehicle (90) approaches, a state 1 indicated by the broken line changes to a state 2 indicated by the dash-dot line (S2). A reduction in induced voltage and a phase change occur with respect to the induced voltage when the first reception coil (RX1) is in the magnetic field of state 1 (when the vehicle is not detected) (S3). The differential output signals of the second reception coil RX2 and the first reception coil RX1 change according to the advancement of the vehicle and according to the unevenness of the vehicle bottom portion 92 and the metal species (S4).

Abstract: A powder feeding device includes: a hopper including a discharge port for discharging powder; and a conveyance device configured to move a conveyance surface disposed below the discharge port in a first direction and invert the conveyance surface in a front end portion. The hopper includes a front wall portion positioned on a downstream side of the discharge port in the first direction. A predetermined gap is formed between a lower end of the front wall portion and the conveyance surface. In the powder feeding device, powder deposited on the conveyance surface is conveyed in the first direction by the conveyance device with a thickness corresponding to the gap and dropped from the front end portion.

Abstract: A three-dimensional shaping device shapes a three-dimensional article by irradiating a powder material with an electron beam and melting the powder material. The three-dimensional shaping device includes an electron beam emitting unit emitting the electron beam, melting the powder material in order to shape the article, and performing preliminary heating of the powder material by irradiating the powder material with the electron beam before the article is shaped. The electron beam emitting unit moves an irradiation position of the electron beam in a spiral pattern when the powder material is irradiated with the electron beam for preliminary heating.

Abstract: A powder supply device includes a hopper accommodating powder, a cylindrical roller provided below the hopper and rotatable around a rotational axis, and a wall surface storing the powder in a space between the roller and the wall surface. The powder supply device moves the powder stored between the roller and the wall surface in a rotation direction of the roller and drops the powder by the roller rotating. A plurality of groove portions extending in an axial direction are formed in a peripheral surface of the roller. At least one of the groove portions is formed such that a capacity allowing the powder to be accommodated changes in the axial direction.

Abstract: An oscillation jig includes: an oscillation jig base connected to an oscillation table; a first clamp member provided in the oscillation jig base; a second clamp member located at a position opposed to the first clamp member in an oscillation direction and configured to hold a first metal component together with the first clamp member; a link mechanism provided in the oscillation jig base, composed of a plurality of links connected together, connected to the second clamp member, and caused to extend and contract in the oscillation direction; and a clamp actuator configured to cause the link mechanism to extend and contract in the oscillation direction. When the first clamp member and the second clamp member hold the first metal component, a connection center line connecting connection centers of the respective links is made straight in the oscillation direction.

Abstract: An oscillation jig includes: an oscillation jig base connected to an oscillation table; a first clamp member provided in the oscillation jig base; a second clamp member located at a position opposed to the first clamp member in an oscillation direction and configured to hold a first metal component together with the first clamp member; a link mechanism provided in the oscillation jig base, composed of a plurality of links connected together, connected to the second clamp member, and caused to extend and contract in the oscillation direction; and a clamp actuator configured to cause the link mechanism to extend and contract in the oscillation direction. When the first clamp member and the second clamp member hold the first metal component, a connection center line connecting connection centers of the respective links is made straight in the oscillation direction.

Abstract: A device for cutting a brittle member such as a glass is comprised of a laser oscillator configured to radiate a laser beam through a first space onto a first region on the brittle member; a cooling nozzle configured to expel a cooling medium onto a second region distinct from the first region on the brittle member; a baffle so disposed as to leave a gap between the member and the baffle and to have the first region not enclosed by the baffle, and so directed as to deflect a flow of a splash and a mist originating in the second region away from the first region; and a gas nozzle configured to expel a gas toward the gap.