Abstract: A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical property value of a gas between the first and second members, inputting a movement profile of the second member with respect to the first member when bringing the droplets of the curable composition on the first and second members into contact with each other, obtaining a pressure of the gas between the first and second members based on the physical property value and the input movement profile, and predicting, based on the pressure, an amount of a residual gas confined among the droplets by the contact between the droplets and the second member.

Abstract: A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical property value of a gas between the first and second members, inputting a movement profile of the second member with respect to the first member when bringing the droplets of the curable composition on the first and second members into contact with each other, obtaining a pressure of the gas between the first and second members based on the physical property value and the input movement profile, and predicting, based on the pressure, an amount of a residual gas confined among the droplets by the contact between the droplets and the second member.

Abstract: A prediction method of predicting a behavior of droplets of a curable composition in a process of forming a film of the curable composition from a plurality of droplets of the curable composition arranged on a first member, the method including predicting the behavior of the droplets using a learning model, wherein an input of the learning model includes first information indicating positions on the first member to which the droplets of the curable composition are to be arranged.

Abstract: A simulation apparatus that predicts a behavior of a curable composition in a film forming process includes a processor configured to execute behavior computation of the curable composition by a computational method selected from a first computational method and a second computational method which shortens a computation time as compared to the first computational method. The processor is configured to execute behavior computation of the curable composition by the second computational method while applying each of a plurality of tentative parameter sets for the film forming process, decide, from the plurality of tentative parameter sets, a parameter set that produces a result of the behavior computation satisfying a predetermined criterion for evaluation, and execute behavior computation of the curable composition by the first computational method while applying the decided parameter set.

Abstract: The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.

Abstract: The present invention provides a simulation method of predicting a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising: predicting the behavior of the composition in the processing; calculating a distribution of distortion that occurs in at least one of the first member and the second member in the processing; and displaying the distribution of distortion calculated in the calculating, wherein in the displaying, in a case where at least one piece of input information is selected from a plurality of pieces of input information used to predict the behavior of the composition, the at least one piece of input information is displayed to be superimposed as a two-dimensional image on the distribution of distortion.

Abstract: There is provided a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on one of a first member and a second member into contact with an other of the first member and the second member and forming a film of the curable composition on the first member. The method includes generating a link by connecting two adjacent representative points of the plurality of droplets, generating a cell as a closed region formed by a plurality of links, and determining, based on the presence/absence of merging of droplets corresponding to each link forming the cell, whether a bubble is formed in the cell.

Abstract: A simulation apparatus predicts a behavior of a curable composition in a formation process in which the curable composition arranged on a shot region of a substrate and a mold are brought into contact with each other to form a film of the curable composition on the shot region. The apparatus includes a processor configured to obtain the behavior of the curable composition by simulation computation, and output data used to display a simulation image simulating the behavior obtained by the simulation computation. The simulation image includes information of an outer periphery of the shot region and information of an edge portion of the film, which are drawn in a mode that enables visual identification of a position of the edge portion of the film with respect to the outer periphery.

Abstract: The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a second member into contact with a plurality of droplets of the curable composition arranged on a first member and forming a film of the curable composition on the first member, the method comprising: determining a volume used for predicting the behavior with respect to each of a plurality of specific droplets which are arranged inside a prediction target region for predicting the behavior, among the plurality of droplets, based on an index indicating a positional relationship between a boundary of the prediction target region and each specific droplet; and predicting the behavior of the curable composition inside the prediction target region based on the volume determined with respect to each of the plurality of specific droplets.

Abstract: The invention provides a simulation method that predicts a behavior of a droplet of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film made of the curable composition in a space between the first member and the second member, the method including obtaining, for each of the plurality of droplets of the curable composition, gas information, which includes at least the mole of a gas trapped in a closed region formed by adjacent droplets merging with each other, based on an evaluation value for evaluating a relationship related to a degree of merging between the adjacent droplets, and displaying the gas information, obtained in the obtaining, together with information indicating a state of the droplet corresponding to the gas information.

Abstract: An imprint mold having an imprint surface that comes into contact with a curable composition on a substrate, the imprint mold includes a concavo-convex pattern formed on the imprint surface of the imprint mold, and a first step portion that has a first surface having a depth of 0.5 times or more and 2 times or less a depth of the concavo-convex pattern in an outer peripheral portion of an area where the concavo-convex pattern is formed.

Abstract: An imprint mold includes a mesa portion projecting from a base material. The mesa portion includes a contact surface configured for contact with a curable composition made of an organic material, and a surface of a side wall at which the contact surface projects from the base material. A liquid repellent surface is formed on at least the surface of the side wall, the liquid repellent surface having a contact angle with respect to the curable composition being higher than a contact angle of the contact surface. The liquid repellent surface includes at least one type of compound selected from the group consisting of an oxide of an inorganic element, a fluoride of an inorganic element, and a nitride of an inorganic element.

Abstract: A medical data processing device according to an embodiment includes processing circuitry. The processing circuitry acquires estimated data related to a state of a biological organ at a first timing, and actually measured data indicating the state of the biological organ at the first timing. The processing circuitry calculates a parameter based on the estimated data and the actually measured data. The processing circuitry estimates a state of the biological organ in a predetermined time phase at a second timing different from the first timing based on the parameter and the estimated data in the predetermined time phase.

Abstract: The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method including for each of the plurality of droplets of the curable composition, obtaining, based on whether the droplet merges with an adjacent droplet, an evaluation value for evaluating a relationship regarding a degree of merging with the adjacent droplet, and displaying, together with information indicating a state of the droplet corresponding to the evaluation value, the evaluation value obtained in the obtaining.

Abstract: The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method including determining a second range for executing second simulation for predicting the behavior with second accuracy higher than first accuracy, the second range being included in a first range for executing first simulation for predicting the behavior with the first accuracy and the second range being smaller than the first range, executing the second simulation in the second range, and displaying a result of the second simulation executed in the second range.

Abstract: The present invention provides an information processing apparatus comprising: an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain the captured image of the curable composition; a generator configured to generate a predicted image representing a prediction result of a behavior of the curable composition on the substrate in the process; and a display controller configured to display, on a display unit, the captured image and the predicted image to be comparable to each other.

Abstract: A simulation method is performed for simulating a behavior of a curable composition in a film forming apparatus that brings the curable composition arranged on a first member and a second member into contact with each other, and forms a film of the curable composition on the first member. The method includes obtaining a difference between a nominal value for simulating the behavior and an actual value corresponding to the nominal value in the film forming apparatus, and simulating the behavior using, as input information, the actual value obtained from the nominal value and the difference.

Abstract: A simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member and a second member into contact with each other and forming a film of the curable composition on the first member is disclosed. The method includes defining a computational grid formed by a plurality of computational elements so that a plurality of droplets of the curable composition fall within one computational element, and obtaining the behavior of the curable composition in each computational element in accordance with a model corresponding to a state of the curable composition in each computational element.

Abstract: In order to provide an efficient and favorable simulation method for obtaining the disappearance of a number of air bubbles in one entire shot or the like, for example, there is provided a simulation method for simulating a film forming process of forming a film by coating an upper part of a substrate with a curable composition in a form of a plurality of droplets and bringing a mold into contact therewith. The simulation method includes a first step of computing a size of each air bubble at a time when air bubbles become trapped due to the mold brought into contact therewith and a time of becoming trapped, and a second step of obtaining a disappearing process of each of the air bubbles on the basis of information of the size of each of the air bubbles and the time.

Abstract: A simulation method predicts a behavior of a curable composition in a process of bringing droplets of the curable composition arranged on first and second members into contact with each other, and forming a film of the curable composition on the first member. The method includes inputting a physical property value of a gas between the first and second members, inputting a movement profile of the second member with respect to the first member when bringing the droplets of the curable composition on the first and second members into contact with each other, obtaining a pressure of the gas between the first and second members based on the physical property value and the input movement profile, and predicting, based on the pressure, an amount of a residual gas confined among the droplets by the contact between the droplets and the second member.