Patents by Inventor Yuichiro Okajima

Yuichiro Okajima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin film deposition method and gas sensor made by the method
    Patent number: 5821402
    Abstract: A gas sensor including a substrate, a heater formed on said substrate, and a gas sensing material to be heated by said heater, wherein the area of the substrate under the heater is removed or reduced in its thickness to form a cavity. The thickness of the layer of the gas sensing material is reduced gradually toward the peripheral of the gas sensing material.
    Type: Grant
    Filed: March 7, 1997
    Date of Patent: October 13, 1998
    Assignee: Tokyo Gas Co., Ltd.
    Inventors: Yuichiro Okajima, Kei Kikuchi, Takahiro Ide, Kenichi Nakamura