Patents by Inventor Yuji Awano
Yuji Awano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9564589Abstract: A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.Type: GrantFiled: March 27, 2015Date of Patent: February 7, 2017Assignee: FUJITSU LIMITEDInventors: Yuji Awano, Noriyoshi Shimizu
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Publication number: 20150207074Abstract: A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.Type: ApplicationFiled: March 27, 2015Publication date: July 23, 2015Applicant: FUJITSU LIMITEDInventors: Yuji Awano, Noriyoshi Shimizu
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Patent number: 9017636Abstract: A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.Type: GrantFiled: December 5, 2012Date of Patent: April 28, 2015Assignee: Fujitsu LimitedInventors: Yuji Awano, Noriyoshi Shimizu, Shintaro Sato
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Patent number: 8535635Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: GrantFiled: June 19, 2009Date of Patent: September 17, 2013Assignee: Fujitsu LimitedInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Patent number: 8533945Abstract: A CNT bundle is formed by growing a plurality of CNTs from opposing surfaces of contact blocks toward mutual opposing surfaces, and by contacting the CNTs so that they intersect to electrically connect with each other. Subsequently, a gap of the electrically connected CNT bundle is filled with a metal material, to thereby form a wiring being a composite state of the CNT bundle and the metal material.Type: GrantFiled: March 31, 2008Date of Patent: September 17, 2013Assignee: Fujitsu Semiconductor LimitedInventors: Mizuhisa Nihei, Shintaro Sato, Daiyu Kondo, Yuji Awano
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Patent number: 8293577Abstract: A semiconductor package is disclosed that includes a semiconductor device; a circuit board; and a connection mechanism including a first conductive terminal provided on the semiconductor device, and a second conductive terminal provided on the circuit board side, the connection mechanism electrically connecting the semiconductor device and the circuit board via the first conductive terminal and the second conductive terminal. At least one of the first conductive terminal and the second conductive terminal of the connection mechanism includes one or more carbon nanotubes each having one end thereof fixed to the surface of the at least one of the first conductive terminal and the second conductive terminal, and extending in a direction away from the surface. The first conductive terminal and the second conductive terminal engage each other through the carbon nanotubes.Type: GrantFiled: September 29, 2010Date of Patent: October 23, 2012Assignee: Fujitsu LimitedInventors: Yuji Awano, Masataka Mizukoshi
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Patent number: 8277770Abstract: Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.Type: GrantFiled: August 1, 2007Date of Patent: October 2, 2012Assignees: Fujitsu Limited, Meijo University Educational FoundationInventors: Yuji Awano, Shigeya Naritsuka, Akio Kawabata, Takahiro Maruyama
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Patent number: 7923283Abstract: An integrated circuit device having vias having good resistance to migration causing the breaking of a wiring line, or an integrated circuit device having a wiring structure that is fined by breaking the limit of lithography technique is provided. The former device comprises a plurality of elements fabricated on a semiconductor substrate, wiring lines for making the elements and the integrated circuit device function, and vias for interconnecting wiring lines in separate layers, the via being formed of one or more cylindrical structures made up of carbon atoms. The latter device comprises a plurality of elements fabricated on a semiconductor substrate and wiring members for making the elements and the integrated circuit device function, at least part of the wiring members being formed of one or more cylindrical structures made up of carbon atoms.Type: GrantFiled: December 21, 2007Date of Patent: April 12, 2011Assignee: Fujitsu LimitedInventor: Yuji Awano
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Publication number: 20110021016Abstract: A semiconductor package is disclosed that includes a semiconductor device; a circuit board; and a connection mechanism including a first conductive terminal provided on the semiconductor device, and a second conductive terminal provided on the circuit board side, the connection mechanism electrically connecting the semiconductor device and the circuit board via the first conductive terminal and the second conductive terminal. At least one of the first conductive terminal and the second conductive terminal of the connection mechanism includes one or more carbon nanotubes each having one end thereof fixed to the surface of the at least one of the first conductive terminal and the second conductive terminal, and extending in a direction away from the surface. The first conductive terminal and the second conductive terminal engage each other through the carbon nanotubes.Type: ApplicationFiled: September 29, 2010Publication date: January 27, 2011Applicant: FUJITSU LIMITEDInventors: Yuji Awano, Masataka Mizukoshi
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Patent number: 7830009Abstract: A semiconductor package is disclosed that includes a semiconductor device; a circuit board; and a connection mechanism including a first conductive terminal provided on the semiconductor device, and a second conductive terminal provided on the circuit board side, the connection mechanism electrically connecting the semiconductor device and the circuit board via the first conductive terminal and the second conductive terminal. At least one of the first conductive terminal and the second conductive terminal of the connection mechanism includes one or more carbon nanotubes each having one end thereof fixed to the surface of the at least one of the first conductive terminal and the second conductive terminal, and extending in a direction away from the surface. The first conductive terminal and the second conductive terminal engage each other through the carbon nanotubes.Type: GrantFiled: September 14, 2007Date of Patent: November 9, 2010Assignee: Fujitsu LimitedInventors: Yuji Awano, Masataka Mizukoshi
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Publication number: 20100244262Abstract: A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.Type: ApplicationFiled: March 26, 2010Publication date: September 30, 2010Applicant: FUJITSU LIMITEDInventors: Yuji Awano, Noriyoshi Shimizu, Shintaro Sato
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Patent number: 7786487Abstract: Disclosed is a semiconductor device including a SiC substrate and a heat conductor formed in a hole in the SiC substrate and made of a linear structure of carbon elements.Type: GrantFiled: March 10, 2004Date of Patent: August 31, 2010Assignee: Fujitsu LimitedInventors: Mizuhisa Nihei, Masahiro Horibe, Yuji Awano, Kazukiyo Joshin
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Patent number: 7755115Abstract: A field effect transistor according to the present invention includes a carbon nanotube of two or more walls having an inner wall and an outer wall, source and drain electrodes formed on both sides of the carbon nanotube, and a gate electrode formed in a gate formation region of the carbon nanotube, wherein the outer wall of the carbon nanotube is removed in the gate formation region to expose the inner wall, an insulation film is formed on the exposed inner wall, the gate electrode is formed on the exposed inner wall via the insulation film or via a Schottky junction, the source and drain electrodes are formed in contact with the outer wall and inner wall, and the carbon nanotube between the source and drain electrodes and the insulation film is covered by the outer wall.Type: GrantFiled: September 2, 2008Date of Patent: July 13, 2010Assignee: Fujitsu LimitedInventor: Yuji Awano
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Publication number: 20100124529Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: ApplicationFiled: June 19, 2009Publication date: May 20, 2010Applicant: FUJITSU LIMTEDInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Patent number: 7696512Abstract: The electron device of the present invention has a carbon-based linear structural body including at least one conductive particle, a first electrode and a second electrode disposed at both end of the carbon-based linear structural body, so as to subject the carbon-based linear structural body including at least one conductive particle to connect between the first electrode and the second electrode. A process of manufacturing the electron device includes steps of: forming a carbon-based linear structural body including at least one conductive particle, using a catalyst of a first island and a second island selected from two or more of islands of the catalyst on a substrate; and forming a first electrode and a second electrode so as to connect the first electrode with the first island and one end of the carbon-based linear structural body, and the second electrode with the second island and the other end of the carbon-based linear structural body.Type: GrantFiled: May 19, 2003Date of Patent: April 13, 2010Assignees: Fujitsu Limited, National Institute of Advanced Industrial Science and TechnologyInventors: Yuji Awano, Kazuhiko Matsumoto
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Patent number: 7633148Abstract: A plurality of conductive pads (2) are formed on a mounting surface of a mounting board. Conductive pads (11) are formed on a principal surface of a semiconductor chip (10) at positions corresponding to the conductive pads of the mounting board, when the principal surface faces toward the mounting board. A plurality of conductive nanotubes (12) extend from the conductive pads of one of the mounting board and the semiconductor chip. A press mechanism (3) presses the semiconductor chip against the mounting board and restricts a position of the semiconductor chip on the mounting surface to mount the semiconductor chip on the mounting board, in a state that tips of the conductive nanotubes are in contact with the corresponding conductive pads not formed with the conductive nanotubes.Type: GrantFiled: February 15, 2007Date of Patent: December 15, 2009Assignee: Fujitsu LimitedInventors: Yuji Awano, Masataka Mizukoshi, Taisuke Iwai, Tomoji Nakamura
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Publication number: 20090136412Abstract: Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.Type: ApplicationFiled: August 1, 2007Publication date: May 28, 2009Applicants: FUJITSU LIMITED, MEIJO UNIVERSITY EDUCATIONAL FOUNDATIONInventors: Yuji Awano, Shigeya Naritsuka, Akio Kawabata, Takahiro Maruyama
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Publication number: 20090072223Abstract: A field effect transistor according to the present invention includes a carbon nanotube of two or more walls having an inner wall and an outer wall, source and drain electrodes formed on both sides of the carbon nanotube, and a gate electrode formed in a gate formation region of the carbon nanotube, wherein the outer wall of the carbon nanotube is removed in the gate formation region to expose the inner wall, an insulation film is formed on the exposed inner wall, the gate electrode is formed on the exposed inner wall via the insulation film or via a Schottky junction, the source and drain electrodes are formed in contact with the outer wall and inner wall, and the carbon nanotube between the source and drain electrodes and the insulation film is covered by the outer wall.Type: ApplicationFiled: September 2, 2008Publication date: March 19, 2009Applicant: FUJITSU LIMITEDInventor: Yuji AWANO
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Publication number: 20080236875Abstract: A CNT bundle is formed by growing a plurality of CNTs from opposing surfaces of contact blocks toward mutual opposing surfaces, and by contacting the CNTs so that they intersect to electrically connect with each other. Subsequently, a gap of the electrically connected CNT bundle is filled with a metal material, to thereby form a wiring being a composite state of the CNT bundle and the metal material.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: FUJITSU LIMITEDInventors: Mizuhisa NIHEI, Shintaro SATO, Daiyu KONDO, Yuji AWANO
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Patent number: 7417320Abstract: A Ti film is pattern-formed on a desired portion on a silicon substrate, and a Co film is formed on the substrate so as to cover the Ti film. CNTs are formed only on a portion, under which the Ti film is formed, of the surface of the Co film at approximately 600° C. by a thermal CVD method. The length of the CNT can be controlled by adjusting the thickness of the Ti film.Type: GrantFiled: July 14, 2005Date of Patent: August 26, 2008Assignee: Fujitsu LimitedInventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe, Shintaro Sato, Daiyu Kondo, Yuji Awano