Abstract: Before forming a resist pattern, the light reflectivity of the undercoat of the wafer is measured by a reflectivity measuring unit. The conditions are controlled according to the measured reflectivity when forming the resist pattern. The conditions when forming the resist pattern are the rotation speed when supplying the resist solution while rotating the wafer inside the resist coating unit, the exposure time in the exposing unit, the developing time in the developing unit, and so forth. Thus, by controlling the conditions when forming the resist pattern according to the light reflectivity of the wafer's undercoat, a highly fine control of the line width of the resist pattern is made possible.

Abstract: Before forming a resist pattern, the light reflectivity of the undercoat of the wafer is measured by a reflectivity measuring unit. The conditions are controlled according to the measured reflectivity when forming the resist pattern. The conditions when forming the resist pattern are the rotation speed when supplying the resist solution while rotating the wafer inside the resist coating unit, the exposure time in the exposing unit, the developing time in the developing unit, and so forth. Thus, by controlling the conditions when forming the resist pattern according to the light reflectivity of the wafer's undercoat, a highly fine control of the line width of the resist pattern is made possible.

Abstract: A resist processing method includes setting a substrate at a specific temperature, forming a resist film on the substrate by applying a resist solution onto the substrate while turning the substrate set at the specific temperature, heating the substrate on which the resist film has been formed, cooling the substrate a specific temperature after the heating process, wherein the thickness of the resist film on the substrate is measured between the heating process and the cooling process.

Abstract: This invention has an object of providing a compact and inexpensive apparatus and method of combustion for a pipestill heater which enjoys high thermal efficiency insusceptible of the restriction imposed by either the inlet temperature of the process fluidor the magnitude of the allowable pressure drop in the coil, incurs only a sparing possibility of polluting the environment, and produces only a petty pressure fluctuation in the combustion chamber.In the pipestill heater of this invention, the combustion devices which are disposed so as to confront the combustion chambers of the furnace are each provided with an air permeable heat accumulator made of a refractory material and a duct part having an oxidizing agent supply path and an exhaust gas discharge path formed therein, whereby the oxidizing agent for combustion is heated with the exhaust gas through the heat accumulator by virtue of the relative rotation of the heat accumulator and the duct part with rotating means.

Abstract: A process for producing a denitration catalyst comprising the following steps of immersing a base material composed of an inorganic fiber cloth in an aqueous slurry containing 5 to 20% by weight of at least one sol-form substance selected from the group consisting of silica sol, titania sol and zirconia sol, as a first component, 20 to 70% by weight of at least one inorganic oxide fine powder selected from the group consisting of those of titania, zirconia and cordierite, as a second component, and 1 to 3% by weight of at least one organic binder selected from the group consisting of polyvinyl alcohol, polyvinyl acetate and carboxymethyl cellulose, as a third component, removing superfluous liquid from the resulting base material, drying the base material, coating catalyst components onto the surface of the dried base material, and drying and calcining the resulting material, are proposed.

Abstract: A catalyst for reducing nitrogen oxides in the exhaust gas with ammonia, having a catalyst composition coated on an inorganic fiber cloth as a substrate is provided. The inorganic fiber cloth is impregnated with at least one inorganic oxide selected from silica and said catalyst composition, preferably with an organic binder like polyvinyl alcohol, so that the weight ratio of the inorganic oxide/said inorganic fiber cloth is in the range of 0.05 to 0.8 and the inorganic oxide is substantially placed between the fibers constituting said inorganic fiber cloth.The above inorganic fiber cloth is preferably a glass fiber cloth, more preferably a glass fiber cloth which surface is acid-treated to have a layer deficient in alumina and calcium oxide.

Abstract: An apparatus for developing a resist film coated on a rotatable base plate, comprising means for supporting and rotating the base plate and nozzle means for feeding a developer onto the resist film. The nozzle means comprises a nozzle arm extending over the base plate and having a plurality of nozzles arranged along the length of the nozzle arm. Disclosed also is a method for developing a resist film coated on a rotatable base plate with a developer fed from a plurality of nozzles arranged on a nozzle arm along the length of the nozzle arm. The method comprises feeding the developer from th respective nozzles onto the resist film while rotating the base plate and while scanning the nozzle arm over the resist film.

Abstract: A hollow marine fender comprising a hollow cylindrical body formed of elastic rubber material. At least one end portion of a center surface of the hollow cylindrical body diverge toward the end thereof to form a horn-shaped portion.

Abstract: An apparatus for restraining and berthing a floating body or vessel on a water surface at a quay wall, comprises a driving subsystem, a movable member driven by the driving subsystem and forwardly and backwardly guided by guide members, and an elastic end piece such as a marine fender secured to the movable member and projecting away from the quay wall. The apparatus according to the invention can exactly move the end piece to a desired position for restraining the floating body and can utilize precompressive forces arising in the end piece, thereby accommodating tolerances or unintensional errors of the quay wall in construction and absorbing rocking energy of the floating body to hold it firmly in place in a harbor. The apparatus according to the invention retracts its elastic piece in a rest or inoperative position and extends it in an operative position to be in contact with a floating body such as a ship or boat to serve as a marine fender.