Abstract: A conveyance equipment includes swirl flow-forming body, discharge fluid rectification cover and skirt. The swirl flow-forming body has columnar first body. A columnar recess is inward of lower end face of first body. A pair of fluid passages are formed in columnar first body to extend to inside surface of columnar recess and supply fluid into columnar recess to generate swirling flow. The discharge fluid rectification cover has a second body which includes a disk-shaped base plate and a peripheral wall that extends around the periphery of the base plate. The second body is positioned to cover the columnar recess. A suction port is in the bottom plate. A discharge passage is in the peripheral wall to extend generally tangential to the inside surface of peripheral wall. The skirt is cylindrical and is made of an elastic thin film, a top opening of which is connected to the suction port.

Abstract: A conveyance device includes a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.

Abstract: A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming supply paths for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.

Abstract: Provided is a charged particle beam device capable of detecting signal charged particles in a wide range of elevation angles from a large elevation angle to a small elevation angle and distinguishing detection signals between backscattered charged particles and secondary charged particles regardless of distribution of the signal charged particles. The charged particle beam device according to the disclosure includes a first detector that detects the secondary charged particles or the backscattered charged particles and a second detector that detects tertiary charged particles generated from the first detector, and generates an observation image of a sample using a signal value obtained by subtracting at least a part of a second detection signal output by the second detector from a first detection signal output by the first detector, or subtracting at least a part of the first detection signal from the second detection signal.

Abstract: Swirl flow-forming body includes main body, first end face that is formed at main body and faces a member to which suction is applied, hole that opens on first end face, jetting port that is formed on inner periphery of main body, inner periphery facing hole, and fluid passage that allows fluid to be discharged into hole via jetting port so as to form a swirl flow that generates negative pressure for applying suction to the member. Inner periphery is formed so as to guide fluid discharged via jetting port, in a direction away from the member, to be discharged from hole.

Abstract: A suction device that holds a member by suction in a stable manner is provided. The suction device includes a columnar main body, a flat end face formed on the main body, a concave part formed in the end face, a fluid flow-forming means for forming a fluid swirl flow in the concave part by discharging fluid into the concave part, the fluid swirl flow generating negative pressure that applies suction to a member, and a linear guide groove formed on the end surface along a direction in which the fluid discharged into the concave part flows out of the concave part.

Abstract: Suction device includes swirl flow-forming body that forms a swirl flow to apply suction to material by use of Bernoulli's principle, and case that houses swirl flow-forming body, and guides flow of a fluid flowing out of concave part of swirl flow-forming body. Case includes guide part, flange part, and cover part. Guide part controls flow of a fluid flowing out of concave part of swirl flow-forming body and flowing along end face, such that the fluid flows in a direction away from a position of material. Flange part forms, between flange part and end face, a flow path for a fluid to flow out of concave part. Cover part is fixed on the top surface of main body of swirl flow-forming body.

Abstract: Swirl flow-forming body includes main body, first end face that is formed at main body and faces a member to which suction is applied, hole that opens on first end face, jetting port that is formed on inner periphery of main body, inner periphery facing hole, and fluid passage that allows fluid to be discharged into hole via jetting port so as to form a swirl flow that generates negative pressure for applying suction to the member. Inner periphery is formed so as to guide fluid discharged via jetting port, in a direction away from the member, to be discharged from hole.

Abstract: Baffle plate to be attached to fluid flow-forming body includes baffle plate main body that is attachable to and detachable from fluid flow-forming body. Baffle plate main body allows a fluid to which suction is applied by negative pressure generated by fluid flow-forming body to pass through, while preventing a member from entering concave part of fluid flow-forming body. Baffle plate also includes support member that is attached to main body of fluid flow-forming body at one end thereof, and supports baffle plate main body at the other end thereof such that baffle plate main body opposes end face of fluid flow-forming body. Support member supports baffle plate main body such that a gap between end face and baffle plate main body is maintained, and a fluid path is formed that allows a fluid flowing out of concave part to flow.

Abstract: A charged particle beam device includes a charged particle source that generates a charged particle beam, a focus adjustment unit that adjusts a focal position of the charged particle beam, a deflection unit for scanning the charged particle beam on the sample, a detection unit that detects charged particles generated when the sample is irradiated with the charged particle beam, a detected charged particle selection unit that selects charged particles to be detected by the detection unit, and a control processing unit that makes focus adjustment of the focus adjustment unit and reference adjustment of the detected charged particle selection unit by using information from the detection unit acquired from one scan.

Abstract: Suction equipment 10 is provided with a swirl flow-forming body 1, a baffle plate 2, and connecting members 3 that connect swirl flow-forming body 1 and baffle plate 2. Baffle plate 2 obstructs a member W to which suction is applied from entering a concave part 12 provided in swirl flow-forming body 1. Connecting members 3 form, between end face 13 and baffle plate 2, a flow path for fluid to flow out of concave part 12.

Abstract: Baffle plate to be attached to fluid flow-forming body includes baffle plate main body that is attachable to and detachable from fluid flow-forming body. Baffle plate main body allows a fluid to which suction is applied by negative pressure generated by fluid flow-forming body to pass through, while preventing a member from entering concave part of fluid flow-forming body. Baffle plate also includes support member that is attached to main body of fluid flow-forming body at one end thereof, and supports baffle plate main body at the other end thereof such that baffle plate main body opposes end face of fluid flow-forming body. Support member supports baffle plate main body such that a gap between end face and baffle plate main body is maintained, and a fluid path is formed that allows a fluid flowing out of concave part to flow.

Abstract: A charged particle beam device includes a charged particle source that generates a charged particle beam, a focus adjustment unit that adjusts a focal position of the charged particle beam, a deflection unit for scanning the charged particle beam on the sample, a detection unit that detects charged particles generated when the sample is irradiated with the charged particle beam, a detected charged particle selection unit that selects charged particles to be detected by the detection unit, and a control processing unit that makes focus adjustment of the focus adjustment unit and reference adjustment of the detected charged particle selection unit by using information from the detection unit acquired from one scan.

Abstract: Suction device includes swirl flow-forming body that forms a swirl flow to apply suction to material by use of Bernoulli's principle, and case that houses swirl flow-forming body, and guides flow of a fluid flowing out of concave part of swirl flow-forming body. Case includes guide part, flange part, and cover part. Guide part controls flow of a fluid flowing out of concave part of swirl flow-forming body and flowing along end face, such that the fluid flows in a direction away from a position of material. Flange part forms, between flange part and end face, a flow path for a fluid to flow out of concave part. Cover part is fixed on the top surface of main body of swirl flow-forming body.

Abstract: Suction equipment is provided with a swirl flow-forming body, a baffle plate, and connecting members that connect swirl flow-forming body and baffle plate. Baffle plate obstructs a member to which suction is applied from entering a concave part provided in swirl flow-forming body. Connecting members form, between end face and baffle plate, a flow path for fluid to flow out of concave part.

Abstract: Conveyance equipment for conveying a plate-like member includes plural items of liquid discharging equipment that hold the member by discharging liquid to generate a negative pressure between the liquid discharging equipment and the member. Each of the plural items of liquid discharging equipment includes a columnar main body, a flat end face formed at the main body, which faces the member, a concave part formed at the end face, and one or more liquid passages that discharge liquid into the concave part at a peripheral edge of the concave part. The one or more liquid passages are arranged so that a direction in which a liquid flows out of the concave part along the end face and a direction from a center of gravity of the member toward a position of the member, opposite the liquid discharging equipment, form an angle smaller than or equal to 90 degrees.

Abstract: Swirl flow-forming body for holding a plate-like member by discharging fluid to generate a negative pressure between the swirl flow-forming body and the member includes columnar main body, flat end face formed at the main body, that faces the member, concave part formed at the end face, introduction passages that discharge liquid into the concave part to from a liquid swirl flow, and introduction passages that discharge gas into the concave part to from a gas swirl flow.

Abstract: Holding equipment for holding a plate-like member by discharging fluid to generate a negative pressure between the holding equipment and the member, includes a columnar main body, a flat end face formed at the main body, that faces the member, a concave part formed at the end face, one or more fluid passages that discharge fluid into the concave part to form a swirl flow or a radial flow, and a liquid supply device for supplying a part of the member with a liquid, the part facing the centre of the swirl flow or the radial centre of the radial flow.

Abstract: Foreign substances present in a sample chamber are attached to or drawn close to an objective lens and an electrode disposed close to the objective lens by applying a higher magnetic field than when normally used to the objective lens and applying a higher electric field than when normally used to the electrode disposed close to the objective lens. A stage is moved such that the center of an optical axis is located directly above a dedicated stand capable of applying voltage, the magnetic field of the objective lens is turned off, and then the potential difference between the electrode disposed close to the objective lens and an electrode disposed close to the sage is periodically maximized and minimized to thereby forcibly drop the foreign substances onto the dedicated stand capable of applying voltage.

Abstract: Foreign substances present in a sample chamber are attached to or drawn close to an objective lens and an electrode disposed close to the objective lens by applying a higher magnetic field than when normally used to the objective lens and applying a higher electric field than when normally used to the electrode disposed close to the objective lens. A stage is moved such that the center of an optical axis is located directly above a dedicated stand capable of applying voltage, the magnetic field of the objective lens is turned off, and then the potential difference between the electrode disposed close to the objective lens and an electrode disposed close to the sage is periodically maximized and minimized to thereby forcibly drop the foreign substances onto the dedicated stand capable of applying voltage.