Patents by Inventor Yuji Minegishi
Yuji Minegishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240023217Abstract: A light source parameter information management method for managing information on a parameter of a light source used in an exposure apparatus, the method including acquiring priority target parameter information containing an item of a variable that is a priority target parameter prioritized in the operation of the light source, and a target value of the variable, estimating maintenance information based on the priority target parameter information, the maintenance information containing a value representing the life of a consumable in the light source until maintenance of the consumable, and outputting the maintenance information.Type: ApplicationFiled: August 1, 2023Publication date: January 18, 2024Applicant: Gigaphoton Inc.Inventors: Yuji MINEGISHI, Osamu WAKABAYASHI
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Patent number: 11822324Abstract: A machine learning method according to a viewpoint of the present disclosure is a machine learning method for creating a learning model configured to estimate the life of a consumable of a laser apparatus, the method including acquiring first life-related information containing data on a parameter relating to the life of the consumable, the data recorded in correspondence with different numbers of oscillation pulses during a period from the start of use of the consumable to replacement thereof, dividing the first life-related information into a plurality of levels each representing the degree of degradation of the consumable in accordance with the numbers of oscillation pulses to create training data, creating the learning model by performing machine learning using the created training data, and saving the created learning model.Type: GrantFiled: July 2, 2021Date of Patent: November 21, 2023Assignee: Gigaphoton Inc.Inventors: Kunihiko Abe, Yuji Minegishi, Satoru Kikuchi, Osamu Wakabayashi
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INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM
Publication number: 20220342311Abstract: An information processing device includes a processor and a storage device. The processor is configured to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read from the storage device.Type: ApplicationFiled: July 6, 2022Publication date: October 27, 2022Applicant: Gigaphoton Inc.Inventors: Yutaka IGARASHI, Satoru KIKUCHI, Kunihiko ABE, Yuji MINEGISHI -
Patent number: 11353857Abstract: A data analyzer includes a data collector that acquires data on each analysis target parameter of each of a plurality of apparatuses from the apparatus, the plurality of apparatuses including a light source apparatus, an exposure apparatus that exposes a wafer to pulsed light outputted from the light source apparatus, and a wafer inspection apparatus that inspects the exposed wafer, an image generator that visualizes the data on each of the parameters collected by the data collector from the apparatuses that process the wafer for each predetermined area of the wafer to convert the data into an image and generates a plurality of mapped images for each of the parameters of the apparatuses, and a correlation computing section that performs pattern matching on arbitrary ones of the mapped images generated from the wafer to determine a correlation value between arbitrary ones of the parameters of the apparatuses.Type: GrantFiled: December 30, 2019Date of Patent: June 7, 2022Assignee: Gigaphoton Inc.Inventors: Yutaka Igarashi, Yuji Minegishi, Osamu Wakabayashi
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Patent number: 11353801Abstract: A maintenance management method for a lithography system according to a viewpoint of the present disclosure includes organizing and saving operating information for each of lithography cells that are each an apparatus group formed of a set of apparatuses and form the lithography system, organizing and saving maintenance information on consumables for each of the lithography cells, calculating a standard maintenance timing for each of the consumables for each of the lithography cells based on the operating information and the maintenance information on the consumable for each of the lithography cells, creating a maintenance schedule plan for each of the lithography cells or for each of manufacturing lines based on the standard maintenance timing, information on a downtime, and information on a loss cost due to the downtime for each of the lithography cells or for each of the manufacturing lines, and outputting the result of the creation of the maintenance schedule plan.Type: GrantFiled: December 28, 2020Date of Patent: June 7, 2022Assignee: Gigaphoton Inc.Inventors: Kunihiko Abe, Yuji Minegishi, Osamu Wakabayashi
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Publication number: 20210333788Abstract: A machine learning method according to a viewpoint of the present disclosure is a machine learning method for creating a learning model configured to estimate the life of a consumable of a laser apparatus, the method including acquiring first life-related information containing data on a parameter relating to the life of the consumable, the data recorded in correspondence with different numbers of oscillation pulses during a period from the start of use of the consumable to replacement thereof, dividing the first life-related information into a plurality of levels each representing the degree of degradation of the consumable in accordance with the numbers of oscillation pulses to create training data, creating the learning model by performing machine learning using the created training data, and saving the created learning model.Type: ApplicationFiled: July 2, 2021Publication date: October 28, 2021Applicant: Gigaphoton Inc.Inventors: Kunihiko ABE, Yuji MINEGISHI, Satoru KIKUCHI, Osamu WAKABAYASHI
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Publication number: 20210117931Abstract: A maintenance management method for a lithography system according to a viewpoint of the present disclosure includes organizing and saving operating information for each of lithography cells that are each an apparatus group formed of a set of apparatuses and form the lithography system, organizing and saving maintenance information on consumables for each of the lithography cells, calculating a standard maintenance timing for each of the consumables for each of the lithography cells based on the operating information and the maintenance information on the consumable for each of the lithography cells, creating a maintenance schedule plan for each of the lithography cells or for each of manufacturing lines based on the standard maintenance timing, information on a downtime, and information on a loss cost due to the downtime for each of the lithography cells or for each of the manufacturing lines, and outputting the result of the creation of the maintenance schedule plan.Type: ApplicationFiled: December 28, 2020Publication date: April 22, 2021Applicant: Gigaphoton Inc.Inventors: Kunihiko ABE, Yuji MINEGISHI, Osamu WAKABAYASHI
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Publication number: 20200133249Abstract: A data analyzer includes a data collector that acquires data on each analysis target parameter of each of a plurality of apparatuses from the apparatus, the plurality of apparatuses including a light source apparatus, an exposure apparatus that exposes a wafer to pulsed light outputted from the light source apparatus, and a wafer inspection apparatus that inspects the exposed wafer, an image generator that visualizes the data on each of the parameters collected by the data collector from the apparatuses that process the wafer for each predetermined area of the wafer to convert the data into an image and generates a plurality of mapped images for each of the parameters of the apparatuses, and a correlation computing section that performs pattern matching on arbitrary ones of the mapped images generated from the wafer to determine a correlation value between arbitrary ones of the parameters of the apparatuses.Type: ApplicationFiled: December 30, 2019Publication date: April 30, 2020Applicant: Gigaphoton Inc.Inventors: Yutaka IGARASHI, Yuji MINEGISHI, Osamu WAKABAYASHI
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Patent number: 10394133Abstract: A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.Type: GrantFiled: March 7, 2018Date of Patent: August 27, 2019Assignee: GIGAPHOTON INC.Inventors: Yuji Minegishi, Yutaka Igarashi, Takeshi Ohta
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Publication number: 20180196347Abstract: A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.Type: ApplicationFiled: March 7, 2018Publication date: July 12, 2018Applicant: GIGAPHOTON INC.Inventors: Yuji MINEGISHI, Yutaka IGARASHI, Takeshi OHTA
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Publication number: 20170102245Abstract: An in-vehicle device according to the present invention includes a notification information acquisition unit that acquires notification information transmitted from an external device, a traveling state evaluation unit that identifies a traveling state of a vehicle in which the in-vehicle device is mounted and evaluates appropriateness of voice output of the notification information, a guidance interference determination unit that determines interference between a voice output of the notification information and another guidance voice when the traveling state evaluation unit evaluates that the notification information is appropriate for voice output, and a voice output control unit that avoids the interference with the guidance voice and performs voice output of the notification information when there is the interference with the guidance voice.Type: ApplicationFiled: October 7, 2016Publication date: April 13, 2017Inventors: Yumi IWATA, Yuji MINEGISHI
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Publication number: 20020051197Abstract: The present invention permits dial-up printing to be realized, which serves for the straightforward use of a company internal printer from outside of the company LAN, whilst preventing unauthorized access to the company LAN.Type: ApplicationFiled: October 24, 2001Publication date: May 2, 2002Applicant: KOMATSU LTD.Inventor: Yuji Minegishi