Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A catalyst deterioration diagnosis system performs a diagnosis of deterioration of the oxidation catalyst based on a high-temperature-inflow-condition exhaust gas temperature and a low-temperature-inflow-condition exhaust gas temperature. The high-temperature-inflow-condition exhaust gas temperature is a temperature detected by a temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a high temperature region H while the reducing agent is supplied from the reducing agent supply means into the exhaust gas that flows into the oxidation catalyst. The low-temperature-inflow-condition exhaust gas temperature is a temperature detected by the temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a low temperature region L while the reducing agent is supplied from a reducing agent supply means into the exhaust gas that flows into the oxidation catalyst.

Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A temperature increasing degree of the catalytic outflow exhaust temperature at the time the exhaust air-fuel ratio is changed to the rich side is found in respect to each of a plurality of the catalytic inflow exhaust temperatures. A grade (S) of the temperature increasing degree is found based upon the inflow exhaust temperature and the temperature increasing degree to determine degradation of the catalyst based upon at least one of a maximum value (Smax) of the grade and the inflow exhaust temperature (Tinmax) corresponding to the maximum value. An accurate catalyst degradation diagnosis can be carried out since not only the temperature increasing degree but also the inflow exhaust temperature are taken into account.

Abstract: A surface inspection tool 110 measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200. The surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: The inspection conditions of a known inspection apparatus necessary for inspection are such that wafers are individually prepared for respective layer types and layer thicknesses, and standard particles having different sizes are applied to all of the wafers. Moreover, the wafers to which standard particles have been applied and which have been prepared for the respective layer types and layer thicknesses are inspected by the inspection apparatus to determine the optimal inspection conditions for the respective layer types and layer thicknesses. Therefore, there are problems that it requires long time and involves high cost to determine the inspection conditions. In the invention, the relation between the layer thickness and the scattering intensity in the inspection apparatus is calculated. The scattering intensity is divided into a plurality of intensity regions, and the inspection conditions optimized for the respective divided regions are determined.

Abstract: A catalyst deterioration diagnosis system performs a diagnosis of deterioration of the oxidation catalyst based on a high-temperature-inflow-condition exhaust gas temperature and a low-temperature-inflow-condition exhaust gas temperature. The high-temperature-inflow-condition exhaust gas temperature is a temperature detected by a temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a high temperature region H while the reducing agent is supplied from the reducing agent supply means into the exhaust gas that flows into the oxidation catalyst. The low-temperature-inflow-condition exhaust gas temperature is a temperature detected by the temperature sensor while the temperature of the exhaust gas that flows into the oxidation catalyst is in a low temperature region L while the reducing agent is supplied from a reducing agent supply means into the exhaust gas that flows into the oxidation catalyst.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: A temperature increasing degree of the catalytic outflow exhaust temperature at the time the exhaust air-fuel ratio is changed to the rich side is found in respect to each of a plurality of the catalytic inflow exhaust temperatures. A grade (S) of the temperature increasing degree is found based upon the inflow exhaust temperature and the temperature increasing degree to determine degradation of the catalyst based upon at least one of a maximum value (Smax) of the grade and the inflow exhaust temperature (Tinmax) corresponding to the maximum value. An accurate catalyst degradation diagnosis can be carried out since not only the temperature increasing degree but also the inflow exhaust temperature are taken into account.

Abstract: An object of the present invention is to provide a surface inspection tool in which a flat inspection range capable of measuring surface roughness of a wafer with patterns with high accuracy and in a nondestructive manner can be searched without visual search. In order to solve the object, in a surface inspection tool 110 which measures scattering light intensity of scattering light generated by irradiated irradiation light in association with a measurement coordinate on a wafer 200 with patterns and inspects the surface roughness of the wafer 200, the surface inspection tool includes a controller 250 which extracts measurement coordinate of the measured scattering light intensity that is equal to or more than a lower limit threshold L, sets an inspection range 406 of the surface roughness inspection in a partial layout 405a of a part of the whole layout 401 of the pattern corresponding to the periphery of the extracted measurement coordinate, and obtains the surface roughness in the inspection range 406.

Abstract: An electronic parts mounting apparatus includes a plurality of parallel parts feeder units each of which accommodates a plurality of electronic parts and sequentially feeds the electronic parts to a predetermined parts pickup position; the parts feeder units being arranged in parallel so as to form a parts feeding section; a positioning device for positioning a member on which the electronic parts are to be mounted; a parts mounting device which seizes each of the electronic parts at a predetermined position of the parts feeding section and which mounts each of the electronic parts on the member; and a detection device for detecting a distal end of each of the parts feeder units so as to determine whether a particular parts feeder unit deviates from a present position.

Abstract: An electronic component mounting apparatus has a movable table on which plural component supply units are arranged in parallel. Each of the component supply units accommodate an electronic component to be mounted on a component mounting member. A guide frame supports the table to move in a direction intersecting perpendicularly to a component supply direction of the component supply unit. A driving shaft is arranged in the direction intersecting perpendicularly to the component supply direction of the component supply unit for moving the table. A positioning device positions the component mounting member. A component mounting device holds the components and mounts the components on the mounting member, and a support member supports the driving shaft at a middle thereof.