Abstract: A deformable mirror unit 7A including a plurality of segment mirrors 71 each having a surface 71a, a flexible member 72 configured to connect the plurality of segment mirrors 71 to each other, a driver 74 configured to apply a driving force to at least one of the segment mirror 71 and the flexible member 72 so as to change at least one of a position and a tilt of the reflection surface 71a of each of the plurality of segment mirrors 71, and a connector 73 configured to connect the driver 74 to at least one of the segment mirror 71 and the flexible member 72 and to be rotatable so as to change a light reflecting direction by the at least one reflection surface 71a is provided.

Abstract: A microscope includes a stage that holds an object, an objective optical system that forms an image of the object, a light receiving unit that receives the image of the object, and a driving unit that moves the stage between a first position where the image of the object is taken and a second position that is different from the first position. The stage includes a nozzle from which a gas is ejected. The nozzle is provided such that the gas is ejected from the nozzle toward the objective optical system when the stage is at the second position.

Abstract: The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.

Abstract: The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.

Abstract: The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.

Abstract: A supporting device that supports an optical element in a gravitational force direction, the supporting device comprises: a supporting member to be connected via an adhesive to an outer circumference of the optical element, the supporting member including a plurality of members each of which has a projection for supporting the optical element. Each of the plurality of members is arranged to have a rigidity lower than that of the adhesive in a direction orthogonal to the gravitational force direction.

Abstract: The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are, orthogonal to each other.

Abstract: A displacement measuring apparatus 100 which measures a displacement of an object to be measured 1 comprises a ranging sensor 5 configured to detect a first origin position based on a distance to a base 2, a ranging sensor 6 configured to detect a second origin position based on a distance to the object to be measured 1, a stage 4 mounting the ranging sensors 5 and 6 and configured to move in a ranging direction of the ranging sensors 5 and 6, and a controller 7 configured to measure a displacement of the object to be measured 1 with respect to the base 2 using the first and second origin positions detected while moving the ranging sensors 5 and 6.

Abstract: A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

Abstract: A holding mechanism for holding an optical element includes a rear side block that includes a rear side holding engagement part that is engageable with a rear side engagement part provided on a rear side of an optical element, a front side block that is coupled with the rear side block and includes a front side holding engagement part that is engageable with a front engagement part provided on a front side of the optical element or the holding member, wherein one of the rear side engagement part and the rear side holding engagement part has a groove and the other has a spherical part that has an at least partially spherical shape engageable with the groove, and wherein one of the front side engagement part and the front side holding engagement part has another groove, and the other has another spherical part that has an at least partially spherical shape engageable with the other groove.

Abstract: A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

Abstract: A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

Abstract: A holding mechanism for holding an optical element includes a rear side block that includes a rear side holding engagement part that is engageable with a rear side engagement part provided on a rear side of an optical element or a holding member that is fixed onto the optical element, and a front side block that is coupled with the rear side block and includes a front side holding engagement part that is engageable with a front engagement part provided on a front side of the optical element or the holding member, wherein one of the rear side engagement part and the rear side holding engagement part has a groove and the other has a spherical part that has an at least partially spherical shape engageable with the groove, and wherein one of the front side engagement part and the front side holding engagement part has another groove and the other has another spherical part that has an at least partially spherical shape engageable with the other groove.

Abstract: A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

Abstract: A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

Abstract: A correction member for correcting a gravity deformation of an optical element includes a first unit for applying an elastic force to the optical element substantially in an anti-gravity direction, and a second unit, arranged opposite to the first unit through the optical element, for applying an elastic force to the optical element substantially in a gravity direction.

Abstract: A support mechanism for supporting an optical element includes a first support member for supporting the optical element, a second support member coupled to the first support member via an elastic member, and a forcing member for applying a force to the elastic member to adjust a position and/or an orientation of the optical element.

Abstract: A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

Abstract: A correction member for correcting a gravity deformation of an optical element includes a first unit for applying an elastic force to the optical element substantially in an anti-gravity direction, and a second unit, arranged opposite to the first unit through the optical element, for applying an elastic force to the optical element substantially in a gravity direction.

Abstract: A lens barrel includes an optical element having a light-transmissive surface which is deformed by its own weight and/or by being supported, and a plurality of protrusive parts which support the optical element. The plurality of protrusive parts are disposed in such a way as to enable the light-transmissive surface of the optical element to be deformed symmetrically with respect to a plane which includes an optical axis.