Abstract: Provided is a plating process that enables merits of an insoluble anode to be sufficiently enjoyed in a jet type plating equipment. Also provided is a plating equipment having a plating tank including an opening part; a solution supply piping; an insoluble anode; and an diaphragm, an diaphragm outer peripheral end being fixed to a plating tank inner wall, a through-hole being provided in an diaphragm center, a hole peripheral end of the through-hole being fixed to the solution supply piping, the diaphragm being arranged so as to be inclined upward in an outer circumferential direction from the solution supply piping. A silicon ring is firmly fixed to each of the outer peripheral end of the diaphragm and a hole edge of the through-hole of the diaphragm. The solution supply piping supplies the plating solution to an upper catholyte chamber in the plating tank, the upper catholyte chamber being formed by the diaphragm and the placed object to be plated.

Abstract: The present invention relates to a nebulizer mesh which is used, in a nebulizer for atomizing and nebulizing liquid, for atomizing the liquid, and has plural through holes 17, wherein each of the through holes 17 forms a cylindrical space portion 174 on one surface side of the nebulizer mesh, and forms an opening 172 opened in a mortar shape on the other surface side, and to a production method thereof.

Abstract: The present invention relates to a nebulizer mesh which is used, in a nebulizer for atomizing and nebulizing liquid, for atomizing the liquid, and has plural through holes 17, wherein each of the through holes 17 forms a cylindrical space portion 174 on one surface side of the nebulizer mesh, and forms an opening 172 opened in a mortar shape on the other surface side, and to a production method thereof.

Abstract: The present invention relates to a nebulizer mesh which is used, in a nebulizer for atomizing and nebulizing liquid, for atomizing the liquid, and has plural through holes 17, wherein each of the through holes 17 forms a cylindrical space portion 174 on one surface side of the nebulizer mesh, and forms an opening 172 opened in a mortar shape on the other surface side, and to a production method thereof.

Abstract: The present invention relates to a nebulizer mesh which is used, in a nebulizer for atomizing and nebulizing liquid, for atomizing the liquid, and has plural through holes 17, wherein each of the through holes 17 forms a cylindrical space portion 174 on one surface side of the nebulizer mesh, and forms an opening 172 opened in a mortar shape on the other surface side, and to a production method thereof.

Abstract: The present invention provides a technology for enabling a diaphragm to be arranged in a more facilitated manner in a plating tank of a plating apparatus having a diaphragm for separating an object to be plated from an anode.

Abstract: Provided is a technique for wafer plating treatment that ensures that the plating film thickness becomes uniform on the total area of a plated wafer surface. This method of wafer plating includes: arranging a wafer in an opening of a plating tank; bringing a peripheral side of the wafer and a cathode electrode into contact with each other; supplying a plating liquid; causing the plating liquid that has reached the wafer to flow in the direction of a periphery of a wafer surface to be plated; and supplying a plating current by an anode electrode arranged within the plating tank so as to be opposed to the wafer and the cathode electrode, whereby the wafer is subjected to a plating treatment. In this method, the anode electrode has a shape almost the same shape as the wafer surface to be plated, a plurality of peripheral-edge current supplying sections are provided in a peripheral edge of the anode electrode, and a central current supplying section is provided in a center of the anode electrode.

Abstract: The present invention provides a technology for enabling a diaphragm to be arranged in a more facilitated manner in a plating tank of a plating apparatus having a diaphragm for separating an object to be plated from an anode.