Abstract: An electric field is formed between a material to be coated 18 and a coating sprayer 4 by applying a high voltage of ?1 kV to ?90 kV to an electrode needle 7 at a tip of the coating sprayer 4, while maintaining the material to be coated 18 positively. An inert gas is sprayed from an inert gas spraying nozzle 8 to the material to be coated 18, and a solution having a dielectric substance dissolved in a solvent is simultaneously sprayed from a dielectric solution spraying nozzle 6, while giving negative charge to the dielectric solution, to form a precursor polarization film. The solution is discharged from the spraying nozzle 6 by injecting the inert gas in the spraying nozzle 6. Then, the electric field is formed again and the precursor polarization film is further polarized, to thereby form a piezoelectric/pyroelectric film on the material to be coated 18.

Abstract: An electric field is formed between a material to be coated 18 and a coating sprayer 4 by applying a high voltage of ?1 kV to ?90 kV to an electrode needle 7 at a tip of the coating sprayer 4, while maintaining the material to be coated 18 positively. An inert gas is sprayed from an inert gas spraying nozzle 8 to the material to be coated 18, and a solution having a dielectric substance dissolved in a solvent is simultaneously sprayed from a dielectric solution spraying nozzle 6, while giving negative charge to the dielectric solution, to form a precursor polarization film. The solution is discharged from the spraying nozzle 6 by injecting the inert gas in the spraying nozzle 6. Then, the electric field is formed again and the precursor polarization film is further polarized, to thereby form a piezoelectric/pyroelectric film on the material to be coated 18.