Patents by Inventor Yuka GOTO

Yuka GOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Film forming method
    Patent number: 11549179
    Abstract: A film forming method includes: (a) preparing a substrate having an oxide layer formed on the substrate; (b) supplying a nitrogen-containing gas to the substrate heated by a heater; and (c) forming a molybdenum film on the oxide layer by alternately supplying a raw material gas containing molybdenum and a reducing gas a plurality of times.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: January 10, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Satoshi Wakabayashi, Yuka Goto, Daisuke Hojo
  • FILM FORMING METHOD AND FILM FORMING APPARATUS
    Publication number: 20210363638
    Abstract: A film forming method includes: (a) preparing a substrate having an oxide layer formed on the substrate; (b) supplying a nitrogen-containing gas to the substrate heated by a heater; and (c) forming a molybdenum film on the oxide layer by alternately supplying a raw material gas containing molybdenum and a reducing gas a plurality of times.
    Type: Application
    Filed: May 12, 2021
    Publication date: November 25, 2021
    Inventors: Satoshi WAKABAYASHI, Yuka GOTO, Daisuke HOJO
  • ELECTROSTATIC POWDER COATING METHOD AND POWDER COATING MATERIAL
    Publication number: 20170087588
    Abstract: An electrostatic powder coating method includes spraying a charged powder coating material including powder particles which contain a thermosetting resin and a thermosetting agent to electrostatically attach the powder coating material to an object to be coated, and heating the powder coating material which is electrostatically attached to the object to be coated to thereby form a coating film, wherein a volume ratio D10c of particles having a particle diameter of greater than or equal to 10 ?m in the powder particles of the powder coating material which is electrostatically attached to the object to be coated and a volume ratio D10o of particles having a particle diameter of greater than or equal to 10 ?m in the powder particles of the powder coating material before being sprayed satisfy a relationship of Expression: D10o×0.80?D10c?D10o×1.20.
    Type: Application
    Filed: February 4, 2016
    Publication date: March 30, 2017
    Applicant: FUJI XEROX CO., LTD.
    Inventors: Yuka GOTO, Takeshi AGATA, Satoshi YOSHIDA, Shigeru SEITOKU, Susumu YOSHINO