Patents by Inventor Yuka Kouyama

Yuka Kouyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High frequency sputtering device
    Patent number: 6878249
    Abstract: The stray capacitance between the target and grounding member and the loss of high frequency electric current are reduced by arranging dielectric members and metal members with a particular configuration at the circumference of the cathode and target.
    Type: Grant
    Filed: May 31, 2001
    Date of Patent: April 12, 2005
    Assignee: Anelva Corporation
    Inventors: Yuka Kouyama, Shinya Hasegawa, Yoichi Numazawa
  • High frequency sputtering device
    Publication number: 20010052458
    Abstract: The stray capacitance between the target and grounding member and the loss of high frequency electric current are reduced by arranging dielectric members and metal members with a particular configuration at the circumference of the cathode and target.
    Type: Application
    Filed: May 31, 2001
    Publication date: December 20, 2001
    Inventors: Yuka Kouyama, Shinya Hasegawa, Yoichi Numazawa