Patents by Inventor Yukako ONO

Yukako ONO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEANING LIQUID, METHOD OF CLEANING, AND METHOD OF MANUFACTURING SEMICONDUCTOR WAFER
    Publication number: 20220298456
    Abstract: The present invention relates to a cleaning liquid on a silicon oxide film and/or a silicon nitride film, and the cleaning liquid contains (i) at least one compound selected from the group consisting of a compound represented by the formula (1), a compound represented by formula (2), a compound represented by formula (3), and a compound represented by the formula (4); and (ii) a reducing agent; in the above formulas, R1 to R12 and n are the same as the definitions described in the description.
    Type: Application
    Filed: June 1, 2022
    Publication date: September 22, 2022
    Applicant: Mitsubishi Chemical Corporation
    Inventors: Longjie AN, Tomohiro KUSANO, Yukako ONO, Kan TAKESHITA, Kenichi KIYONO