Abstract: An ethylene-?-olefin copolymer capable of implementing formation of a film having excellent slipperiness and suppressed fish eyes, a method of producing the ethylene-?-olefin copolymer, an ethylene-based resin composition containing the ethylene-?-olefin copolymer, and a film containing the ethylene-?-olefin copolymer or the ethylene-based resin composition. An ethylene-?-olefin copolymer according to the present invention has: a monomer unit (1) based on ethylene; and a monomer unit (2) based on an ?-olefin having 3 to 20 carbon atoms, wherein a branching parameter is 0.70 to 0.90, and a light scattering area ratio is 1.60 to 3.60.

Abstract: An etching method for etching an organic film on a substrate inside a processing container includes controlling a temperature of the substrate to be at most ?35° C., and supplying a gas containing O into an inside of the processing container.

Abstract: There is provided a thermoplastic elastomer composition from which a molded article having an appearance suitable for non-painting use can be produced. In the thermoplastic elastomer composition containing at least two olefin polymers, a content of an insoluble component in ortho-dichlorobenzene at 140° C. is 20 wt % to 50 wt % and an isothermal crystallization time measured at 130° C. is 300 seconds or longer.

Abstract: A film forming method of forming a predetermined film on a substrate by PEALD includes: adsorbing a precursor on the substrate; and forming plasma from a modifying gas and modifying the precursor adsorbed on the substrate with radicals contained in the plasma. Here, the modifying of the precursor includes supplying a radio frequency power having an effective power smaller than 500 W to a plasma source configured to form the plasma from the modifying gas.

Abstract: A film forming apparatus configured to form a predetermined film on a substrate by PEALD includes a processing container configured to airtightly accommodate the substrate; and a placing table on which the substrate is placed within the processing container. The processing container includes an exhaust opening through which an inside of the processing container is exhausted; an exhaust path configured to connect the exhaust opening and a processing space above the placing table within the processing container; and a partition wall configured to separate a processing space side from an exhaust opening side in the exhaust path. The partition wall includes a flow path configured to connect the processing space side and the exhaust opening side, and the partition wall is formed such that the exhaust opening side is not seen from the processing space side when an extension direction of the exhaust path is viewed from a top.

Abstract: An ethylene-?-olefin copolymer capable of implementing formation of a film having excellent slipperiness and suppressed fish eyes, a method of producing the ethylene-?-olefin copolymer, an ethylene-based resin composition containing the ethylene-?-olefin copolymer, and a film containing the ethylene-?-olefin copolymer or the ethylene-based resin composition. An ethylene-?-olefin copolymer according to the present invention has: a monomer unit (1) based on ethylene; and a monomer unit (2) based on an ?-olefin having 3 to 20 carbon atoms, wherein a branching parameter is 0.70 to 0.90, and a light scattering area ratio is 1.60 to 3.60.

Abstract: There is provided a thermoplastic elastomer composition from which a molded article having an appearance suitable for non-painting use can be produced. In the thermoplastic elastomer composition containing at least two olefin polymers, a content of an insoluble component in ortho-dichlorobenzene at 140° C. is 20 wt % to 50 wt % and an isothermal crystallization time measured at 130° C. is 300 seconds or longer.

Abstract: An etching method for etching an organic film on a substrate inside a processing container includes controlling a temperature of the substrate to be at most ?35° C., and supplying a gas containing O into an inside of the processing container.