Abstract: A cylindrical member manufacturing device is provided. A rear end of an arm is rotatably supported by a base fixed to a rotation shaft coaxial with a drum shaft and separated from the drum shaft in a drum width direction; the arm is set to rotate in a direction so that a front end moves toward and away from an outer circumferential surface of a forming drum; and the base , the arm, and the rotation shaft are integrally rotated about the rotation shaft with the rotating forming drum with the front end moved toward the outer circumferential surface and the arm pressing a front end of a band-like rubber member disposed on the outer circumferential surface and holding a first end on the outer circumferential surface in order to wind the band-like rubber member around the outer circumferential surface and form the band-like rubber member into a cylindrical shape.

Abstract: A servo control signal is binarized using a digital delta-sigma modulator. The digital delta-sigma modulator forms a feedback loop including a digital adder/subtractor, a digital integrator, and a one-bit quantizer to perform pulse-density modulation of the input servo control signal and output the signal as a binary value of +1 or ?1.

Abstract: A CV conversion amplifier is provided that can secure a sufficient capacitance-to-voltage conversion gain and a sufficient amplitude range of an output voltage with a small consumption current. A capacitive sensor using the CV conversion amplifier is provided with low electric power, low noise, and a wide tolerance of input signals. The CV conversion amplifier accepts outputs, as inputs, from a first capacitance and a second capacitance whose capacitance is changed depending on a physical quantity and converts a capacitance value into a voltage.

Abstract: The present invention is directed to a CV conversion amplifier which is small in current consumption and capable of securing a sufficient capacitance-voltage conversion gain and a sufficient amplitude range of an output voltage and a capacitive sensor using the same which is low power consumption, low in noise, and wide in an input signal allowable range. A capacitive sensor includes first and second detection capacitors, a CV conversion circuit includes first and second feedback capacitors and obtains a voltage based on capacitance values of the first and second feedback capacitors, an AD converter performs analog digital conversion on an input voltage and obtains a digital signal, a digital control unit receives the digital signal as an input, and first and second digitally controlled variable capacitors have capacitance values that are controlled by the digital control unit.

Abstract: There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.

Abstract: A low-noise and high-sensitivity inertial sensor is provided. On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.

Abstract: A CV conversion amplifier is provided that can secure a sufficient capacitance-to-voltage conversion gain and a sufficient amplitude range of an output voltage with a small consumption current. A capacitive sensor using the CV conversion amplifier is provided with low electric power, low noise, and a wide tolerance of input signals. The CV conversion amplifier accepts outputs, as inputs, from a first capacitance and a second capacitance whose capacitance is changed depending on a physical quantity and converts a capacitance value into a voltage.

Abstract: Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large. The acceleration sensor is an MEMS capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements for the servo control.

Abstract: An acceleration sensor that achieves a simultaneous operation method of a signal detection and a servo control is provided as an alternative to a time-division processing method. The acceleration sensor is a MEMS capacitive acceleration sensor. The acceleration sensor includes signal detection capacitor pairs 12, 15, and DC servo control capacitor pairs 13, 16, and AC servo control capacitor pairs 14, 17, which are different from the signal detection capacitor pairs 12, 15. A voltage that generates a force in a direction opposite to a detection signal of acceleration detected by the signal detection capacitor pairs 12, 15 is applied to the DC servo control capacitor pairs 13, 16 and the AC servo control capacitor pairs 14, 17.

Abstract: A low-noise and high-sensitivity inertial sensor is provided. On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.