Abstract: There is provided a plasma processing apparatus comprising: a plasma processing chamber having an upper wall, a sidewall, and a lower wall and having therein a plasma processing space; and a magnetic shield disposed around an outer side of the sidewall and having an opening at an upper side thereof. On the assumption that an angle between a line that passes through a midpoint of an inner surface of the upper wall on the plasma processing space side and connects end points of the opening and the inner surface is ?[°] and a product ?i×t of an initial relative permeability ?i of a magnetic material forming the magnetic shield and a thickness t[m] of the magnetic shield is Pmc[m], the angle ?[°] satisfies a condition ?>764×Pmc?2+179×Pmc?1+21.3.

Abstract: Provided is an interlayer film for laminated glass capable of suppressing the generation of an optical strain in laminated glass, and enhancing the damping performance of laminated glass. An interlayer film for laminated glass according to the present invention is an interlayer film for laminated glass having a one-layer or two or more-layer structure, and includes a first layer containing a resin, and when the interlayer film is arranged between two sheets of clear float glass having a thickness of 2.5 mm to obtain a laminated glass X with a size of 150 mm in length and 300 mm in width, and the obtained laminated glass X is subjected to a specific measurement of optical strain, an optical strain value is 3.00 or less, whereas when the interlayer film is arranged between two sheets of clear float glass having a thickness of 2.

Abstract: A water treatment plant which performs water treatment using a water treatment device includes an imaging device, a processing device, and a control device. The imaging device images a water treatment environment of the water treatment device and outputs image data obtained by imaging. The processing device causes an arithmetic device which performs an arithmetic operation using one or more calculation models generated by machine learning to execute the arithmetic operation employing the image data output from the imaging device as input data of the one or more calculation models. The control device controls the water treatment device on the basis of output information output from the arithmetic device by executing the arithmetic operation.

Abstract: A forming system includes a trim blade 7 for cutting off a sheet material 2 provided between a lower die 60 and an upper die 66, a first lower plate 81 provided outside a first lower die end 60a in a side view of the lower die 60, and a first upper plate 85 provided outside an upper die end 66a, configured to reciprocatively move together with the upper die 66 and extending toward the first lower plate 81. A cut plane of the blade 7 intersects a first excess edge portion 25 which is a portion of the sheet material 2 outside the lower die end 60a, and at least a portion of the excess edge portion 25 is sandwiched between the first lower plate 81 and the first upper plate 85 in a state in which the lower die 60 and the upper die 66 are clamped.

Abstract: There is provided a plasma processing apparatus comprising: a plasma processing chamber having an upper wall, a sidewall, and a lower wall and having therein a plasma processing space; and a magnetic shield disposed around an outer side of the sidewall and having an opening at an upper side thereof. On the assumption that an angle between a line that passes through a midpoint of an inner surface of the upper wall on the plasma processing space side and connects end points of the opening and the inner surface is ?[°] and a product ?i×t of an initial relative permeability pi of a magnetic material forming the magnetic shield and a thickness t[m] of the magnetic shield is Pmc[m], the angle ?[°] satisfies a condition ?>764×Pmc?2+179×Pmc?1+21.3.

Abstract: There is a substrate support for use in a plasma processing apparatus, the substrate support comprising: a base; a ceramic plate disposed on the base, the ceramic plate having a substrate supporting region and a ring supporting region surrounding the substrate supporting region; an insulating annular member disposed around the base and the ceramic plate; a fixed edge ring having an inner portion and an outer portion, the inner portion being supported on the ring supporting region, the outer portion being supported on the insulating annular member, the outer portion having a first width; a movable edge ring disposed above the outer portion of the fixed edge ring, the movable edge ring having a second width smaller than the first width; and an actuator configured to vertically move the movable edge ring with respect to the fixed edge ring.

Abstract: In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.

Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.

Abstract: In an antenna including a dielectric window and a slot plate provided on one surface of the dielectric window, in a case where a reference position g is a center position in a width direction of each slot S and a center position in a length direction in the slot plate, the reference position g of each slot is located on a virtual circle centered on a center of gravity G0, and line segments connecting the reference positions g of the slots S and virtual point G1 to which the slots belong are located radially from a virtual point G1, angles (?1 to ?4) between adjacent line segments are equal to each other, and angles (?1 to ?4) formed by the length directions of the slots S at the reference positions g and the line segments to which the slots belong are equal to each other.

Abstract: In one exemplary embodiment, a second waveguide is connected to an upper wall of a first waveguide and communicates with the first waveguide, a dielectric window is in contact with a lower wall of the first waveguide, a first inner conductor penetrates an upper wall, is electrically connected with the upper wall, and extends along the direction of a tube axis from an inside of the first waveguide to an inside of a third waveguide, the third waveguide is connected to the lower wall on the dielectric window side and communicates with the first waveguide, a first opening end of the third waveguide is connected to the dielectric window, and a drive device is connected to the first inner conductor, and is configured to drive the first inner conductor in the direction of the tube axis.

Abstract: An antenna according to an aspect includes: a dielectric window having a first surface and a second surface, the second surface having an annular recessed surface and a flat surface surrounded by the recessed surface; a slot plate; a dielectric plate; a heat transfer member made of metal and having an upper surface and a lower surface opposing each other; a cooling jacket; and a heater, in which the upper surface includes a plurality of first regions and a second region, the cooling jacket is mounted on the plurality of first regions, the second region is recessed further toward the lower surface side than the plurality of first regions, the heater is mounted on the second region, and each of the plurality of first regions is provided at a position at least partially overlapping with the flat surface when viewed in a direction parallel to a central axis.

Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic waves in the first waveguide, two inner conductors disposed at different distances from the tube axis and connected to the dielectric window include coaxial conversion parts which cause propagation of the electromagnetic waves dispersed by the dispersion part to direct to the dielectric window side, a body length of the inner conductor most distant from the tube axis, out of body lengths of the two inner conductors, is longer, and a front surface of the dielectric window does not have irregularities.

Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic waves in the first waveguide, two inner conductors disposed at different distances from the tube axis and connected to the dielectric window include coaxial conversion parts which cause propagation of the electromagnetic waves dispersed by the dispersion part to direct to the dielectric window side, a body length of the inner conductor most distant from the tube axis, out of body lengths of the two inner conductors, is longer, and a front surface of the dielectric window does not have irregularities.

Abstract: An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic wave in the first waveguide, a coaxial conversion part causes propagation of the electromagnetic waves dispersed by the dispersion part to direct to a side of the dielectric window, and a front surface of the dielectric window does not have irregularities.

Abstract: In a microwave output device of an embodiment, a part of travelling wave propagating from a microwave generation unit to an output are output from a directional coupler. A first measurement unit generates an analog signal corresponding to a power of the part of the travelling wave by using diode detection, and converts the analog signal into a digital value. One or more correction coefficients associated with a set frequency and a set power of a microwave designated for the microwave output device are selected. The selected one or more correction coefficients are multiplied by the digital value, and thus a measured value is determined.

Abstract: In a microwave output device of an embodiment, a part of a travelling wave propagating from a microwave generation unit to an output are output from a directional coupler. A first measurement unit generates an analog signal corresponding to a power of the part of the travelling wave by using diode detection, and converts the analog signal into a digital value. One or more correction coefficients associated with a set frequency, a set power, a set bandwidth of a microwave designated for the microwave output device are selected. The selected one or more correction coefficients are multiplied by the digital value, and thus a measured value is determined.

Abstract: In an antenna including a dielectric window and a slot plate provided on one surface of the dielectric window, in a case where a reference position g is a center position in a width direction of each slot S and a center position in a length direction in the slot plate, the reference position g of each slot is located on a virtual circle centered on a center of gravity G0, and line segments connecting the reference positions g of the slots S and virtual point G1 to which the slots belong are located radially from a virtual point G1, angles (?1 to ?4) between adjacent line segments are equal to each other, and angles (?1 to ?4) formed by the length directions of the slots S at the reference positions g and the line segments to which the slots belong are equal to each other.