Patents by Inventor Yuki KUMAMOTO

Yuki KUMAMOTO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Precursor supply system and precursors supply method
    Patent number: 11819838
    Abstract: The present invention provides a supply system enabling a precursor of a solid material or a precursor of a liquid material to be supplied to a latter process at no higher concentration than required and also at or above a predetermined concentration. A supply system 1 comprises: a vessel 11 for receiving a precursor material; a vessel heating unit for heating the vessel at a set temperature; a carrier gas heating unit which is disposed in an introduction line L1 and heats a carrier gas; a main measurement unit which is disposed in an outward conduction line L2 and obtains data relating to a gas of the precursor; and a carrier gas temperature control unit for controlling the temperature of the carrier gas heating unit in accordance with a measurement result of the main measurement unit.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: November 21, 2023
    Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Toshiyuki Nakagawa, Kouki Morimoto, Kazutaka Yanagita, Takashi Kameoka, Yuki Kumamoto, Kazuma Suzuki, Mikio Goto
  • PRECURSOR SUPPLY SYSTEM AND PRECURSORS SUPPLY METHOD
    Publication number: 20190134586
    Abstract: The present invention provides a supply system enabling a precursor of a solid material or a precursor of a liquid material to be supplied to a latter process at no higher concentration than required and also at or above a predetermined concentration. A supply system 1 comprises: a vessel 11 for receiving a precursor material; a vessel heating unit for heating the vessel at a set temperature; a carrier gas heating unit which is disposed in an introduction line L1 and heats a carrier gas; a main measurement unit which is disposed in an outward conduction line L2 and obtains data relating to a gas of the precursor; and a carrier gas temperature control unit for controlling the temperature of the carrier gas heating unit in accordance with a measurement result of the main measurement unit.
    Type: Application
    Filed: March 28, 2017
    Publication date: May 9, 2019
    Inventors: Toshiyuki NAKAGAWA, Kouki MORIMOTO, Kazutaka YANAGITA, Takashi KAMEOKA, Yuki KUMAMOTO, Kazuma SUZUKI, Mikio GOTO