Abstract: A device for producing a master diffraction grating includes a light source unit and a reflecting member 11. The light source unit forms a first interference fringe by irradiating a substrate surface of a master substrate 101 with light. The reflecting member 11 reflects the light from the light source unit reflected on the substrate surface of the master substrate 101 and guides the light again to the substrate surface side to form a second interference fringe. A resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate 101.

Abstract: A device for producing a master diffraction grating includes a light source unit and a reflecting member 11. The light source unit forms a first interference fringe by irradiating a substrate surface of a master substrate 101 with light. The reflecting member 11 reflects the light from the light source unit reflected on the substrate surface of the master substrate 101 and guides the light again to the substrate surface side to form a second interference fringe. A resist pattern based on the first interference fringe and the second interference fringe is formed on the substrate surface of the master substrate 101.

Abstract: A pulse compressor for compressing a laser pulse in a laser device using a chirped pulse amplification method includes two identically shaped diffraction gratings arranged parallel to each other with their respective grating surfaces facing each other and a total reflection mirror for receiving a laser pulse through the diffraction grating and returning it back to the same gratings. Each diffraction grating is a reflective blazed diffraction grating having grooves with a sawtooth-shaped section covered with a reflective Au coating on their surface, with the blaze angle determined so that, at the wavelength of the laser pulse to be used, the incident angle of a laser pulse entering the pulse compressor and first order diffracted light form a relationship of mirror reflection with the groove slope and so that a predetermined level of diffraction efficiency is obtained.

Abstract: A pulse compressor for compressing a laser pulse in a laser device using a chirped pulse amplification method includes two identically shaped diffraction gratings arranged parallel to each other with their respective grating surfaces facing each other and a total reflection mirror for receiving a laser pulse through the diffraction grating and returning it back to the same gratings. Each diffraction grating is a reflective blazed diffraction grating having grooves with a sawtooth-shaped section covered with a reflective Au coating on their surface, with the blaze angle determined so that, at the wavelength of the laser pulse to be used, the incident angle of a laser pulse entering the pulse compressor and first order diffracted light form a relationship of mirror reflection with the groove slope and so that a predetermined level of diffraction efficiency is obtained.