Patents by Inventor Yuki Toriumi

Yuki Toriumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for measuring the thickness of a thin film using the spectral reflection factor of the film
    Patent number: 4787749
    Abstract: A device, usable with an object having a layer, for measuring the thickness of the layer, includes a system for irradiating the object with light while changing its wavelength, the irradiating system having a light-emitting portion disposed opposed to the surface of the object, a photodetecting unit for detecting the light from the object irradiated by the irradiating system, the photodetecting unit having a light-receiving portion disposed opposed to the object, a system for detecting the thickness of the layer of the object on the basis of the detection by the photo-detecting unit, and a setting mechanism for positioning the object, relative to the light-emitting portion and the light-receiving portion, at a distance that substantially corresponds to an extremum of the quantity of light which is to be received by the light-receiving portion and which is variable with the positional relation of the object with the light-emitting portion and the light-receiving portion.
    Type: Grant
    Filed: November 26, 1986
    Date of Patent: November 29, 1988
    Assignee: Canon Kabushiki Kaisha
    Inventors: Mikichi Ban, Yuki Toriumi, Kazuhiko Hara
  • Aligning method
    Patent number: 4643579
    Abstract: A method of aligning a first object and a second object comprises the steps of detecting, in at least two directions of detection in each examination region of which is included the superposed portion of a first area type mark formed on the first object and a second area type mark formed on the second object when the two marks are seen from a predetermined direction, the lengths of the superposed portion and the non-superposed portion of the marks in the first and second objects or the images thereof, and comparing the detected lengths and operating a positional deviation.
    Type: Grant
    Filed: November 19, 1984
    Date of Patent: February 17, 1987
    Assignee: Canon Kabushiki Kaisha
    Inventors: Yuki Toriumi, Kazunori Suzuki, Hiroo Katsuta
  • Press apparatus for planar members
    Patent number: 4637850
    Abstract: A press apparatus for planar members is provided with a first transfer table for transferring a first planar member to a press position, a second transfer table for transferring a second planar member to the press position substantially simultaneously with the first transfer table, a device for aligning the first and second planar members, a device for effecting the parallel feeding of the first and second planar members, and a device for pressing the first and second planar members with a predetermined pressure.
    Type: Grant
    Filed: November 9, 1984
    Date of Patent: January 20, 1987
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kazunori Suzuki, Hiroo Katsuta, Yuki Toriumi