Patents by Inventor Yuki Uozumi

Yuki Uozumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cantilever and inspecting apparatus
    Publication number: 20070051887
    Abstract: The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
    Type: Application
    Filed: August 31, 2006
    Publication date: March 8, 2007
    Inventors: Kishio Hidaka, Motoyuki Hirooka, Mitsuo Hayashibara, Tadashi Fujieda, Hiroki Tanaka, Noriaki Takeshi, Takafumi Morimoto, Satoshi Sekino, Masato Takashina, Yuki Uozumi