Patents by Inventor Yukihide Shigeno

Yukihide Shigeno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Probe apparatus with optical length-measuring unit and probe testing method
    Patent number: 7221177
    Abstract: A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and ?-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.
    Type: Grant
    Filed: July 20, 2005
    Date of Patent: May 22, 2007
    Assignee: Tokyo Electron Limited
    Inventors: Shigekazu Komatsu, Takanori Hyakudomi, Hiromi Chaya, Takahisa Hayashi, Yukihide Shigeno
  • Probe apparatus with optical length-measuring unit and probe testing method
    Publication number: 20050253613
    Abstract: A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and ?-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.
    Type: Application
    Filed: July 20, 2005
    Publication date: November 17, 2005
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Shigekazu Komatsu, Takanori Hyakudomi, Hiromi Chaya, Takahisa Hayashi, Yukihide Shigeno