Patents by Inventor Yukihiko Ishino

Yukihiko Ishino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for removing organic substance from substrate
    Patent number: 4756047
    Abstract: An apparatus for removing organic substances from a substrate, including ultraviolet lamps provided above a horizontal hot plate on which a substrate is placed; an ozone blow-off pipe which blows ozone downward, provided at a position appropriately distant from the surface of the hot plate on which the substrate is placed, the ozone blow-off pipe being so arranged as to be reciprocated relative and parallel to the surface of the hot plate.
    Type: Grant
    Filed: October 15, 1986
    Date of Patent: July 12, 1988
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Noriyuki Hayashi, Hiromi Murayama, Yukihiko Ishino