Abstract: An optical device includes a semiconductor substrate and an optical part having a plurality of columnar members disposed on the substrate. Each columnar member is disposed in a standing manner and adhered each other so that the optical part is provided. The optical part is integrated with the substrate. This optical part has high design freedom.

Abstract: The invention provides a photoresist stripping composition including (a) an alkanolamine other than those alkanolamines falling under the definition of the below-described component (b); (b) an alkanolamine having in the molecule thereof at least one moiety represented by the following formula (1): (wherein each of R1 and R2 represents hydrogen or a methyl group, and R4 represents a C1-C5 alkyl group); (c) an amide solvent or a sulfoxide solvent; (d) a phosphorus-containing compound; (e) an oxycarboxylic acid; and (f) water. The photoresist stripping composition of the present invention can easily remove photoresist film formed on an inorganic substrate, photoresist residues, and dust or similar matter generated during an etching process in the production of liquid crystal display elements or semiconductor elements, and is highly anticorrosive to various materials such as semiconductor layer materials, conductive materials, and insulating materials.

Abstract: The invention provides a photoresist stripping composition including (a) an alkanolamine other than those alkanolamines falling under the definition of the below-described component (b); (b) an alkanolamine having in the molecule thereof at least one moiety represented by the following formula (1): 1

Abstract: A resist film removing composition used in the manufacture of a thin film circuit element having an organic insulation film which comprises 50 to 70% by weight of an alkanolamine having 3 or more carbon atoms, 20 to 30% by weight of a water-miscible solvent and 10 to 20% by weight of water. The resist film removing composition can easily remove a resist film remaining after etching, without swelling the organic insulation film.

Abstract: A photoresist stripping composition comprises (1) a nitrogen-containing organohydroxyl compound, (2) an alkylene glycol monoalkyl ether represented by the general formula: HO—(CpH2pO)q—R, wherein R is C1-C4 alkyl, p is 2 or 3, and q is 1, 2 or 3, (3) sugar or sugar alcohol, (4) a phosphorus-containing compound and (5) water. The photoresist stripping composition easily removes photoresist films on the inorganic substrate, and patterned photoresist films and photoresist residues remaining after etching and photoresist residues in a short period of time without corroding semiconductive materials, circuit-forming materials, insulating materials, etc.

Abstract: A photoresist stripping composition comprises (1) a nitrogen-containing organohydroxyl compound, (2) an alkylene glycol monoalkyl ether represented by the general formula: HO—(CpH2pO)q—R, wherein R is C1-C4 alkyl, p is 2 or 3, and q is 1, 2 or 3, (3) sugar or sugar alcohol, (4) a phosphorus-containing compound and (5) water. The photoresist stripping composition easily removes photoresist films on the inorganic substrate, and patterned photoresist films and photoresist residues remaining after etching and photoresist residues in a short period of time without corroding semiconductive materials, circuit-forming materials, insulating materials, etc.

Abstract: A valve controlling a fuel tank pressure is disposed in a passage connecting the fuel tank and a canister that communicates with atmosphere. The control valve includes a first valve for introducing an atmospheric pressure into the fuel tank when the fuel tank pressure becomes negative and a second valve for releasing an excessively high pressure in the fuel tank. The first valve opens when the fuel tank pressure drops below a predetermined level and closes again when the fuel tank pressure is recovered. To prevent a vibrating operation of the first valve between its open and closed positions, the closing operation of the once opened valve is delayed by an orifice formed through a diaphragm of the valve. The orifice alleviates a quick change of the pressure applied to one surface of the valve. A magnet to restrict the quick movement of the valve may be used in place of the orifice.

Abstract: There is provided a resist film removing composition used in a manufacture of a thin film circuit element having an organic insulation film that can remove a resist film remaining after etching easily without swelling the organic insulation film. The resist film removing composition comprises 50 to 90% by weight of an alkanolamine having 3 or more carbon atoms, 8 to 40% by weight of a water-miscible solvent and 2 to 30% by weight of water.

Abstract: According to the present invention, the exhaust gas recirculation control apparatus includes a first switching valve for controlling communication between the positive pressure supplying source and the control valve. The first switching valve opens only when the control means increases and maintains the predetermined pressure supplied to the EGR valve, and under other conditions, the first switching valve closes, so that the positive pressure of the positive pressure supplying source can be utilized only when needed and the positive pressure accumulated inside the positive pressure supplying source can be prevented from leaking from the control valve. When an air compressor, which is mounted for a braking in a vehicle, is commonly used for the EGR valve as the positive pressure supplying source, air pressure of the brake system in the air compressor can be effectively used, a small-sized EGR apparatus being thereby manufactured.