Abstract: A structure for a gas turbine casing, capable of preventing gas from leaking when the structure is subjected to pressure. A structure for a gas turbine casing, divided by a horizontal plane at flange sections into two halves comprising an upper-half casing (10) and a lower-half casing (11). The structure is provided with bolts (12) which are disposed in the inner surfaces of the upper-half casing (10) and the lower-half casing (11) so as to bridge therebetween, upper nuts (13) which are disposed in the inner surface of the upper-half casing (10) and attached to the bolts (12), and lower nuts (14) which are disposed in the inner surface of the lower-half casing (11) and attached to the bolts (12).

Abstract: A shaft sealing device is provided in an annular space between a rotor and a stator surrounding an outer periphery of the rotor, and divides the annular space in the direction of an axis of the rotor into a high-pressure region and a low-pressure region. The shaft sealing device includes a seal body obtained by stacking a plurality of thin plate sealing pieces in a circumferential direction of the rotor; and a high-pressure side plate that extends from the stator toward the radial inner side so as to run along the high-pressure side of the seal body, and is segmented into a plurality of portions in the circumferential direction, and includes a rigidity imparting member configured to impart rigidity in the direction of the axis to a portion of the surface of the high-pressure side plate that faces the high-pressure region.

Abstract: A shaft sealing device is provided in an annular space between a rotor and a stator surrounding an outer periphery of the rotor, and divides the annular space in the direction of an axis of the rotor into a high-pressure region and a low-pressure region. The shaft sealing device includes a seal body obtained by stacking a plurality of thin plate sealing pieces in a circumferential direction of the rotor; and a high-pressure side plate that extends from the stator toward the radial inner side so as to run along the high-pressure side of the seal body, and is segmented into a plurality of portions in the circumferential direction, and includes a rigidity imparting member configured to impart rigidity in the direction of the axis to a portion of the surface of the high-pressure side plate that faces the high-pressure region.

Abstract: A bolt has a male screw with a surface hardening portion that has an increased surface hardness and that is applied with a compressive residual stress. The male screw is formed by cutting the bolt, and performing a process to provide at least on the surface of the male screw of the bolt the surface hardening portion that has increased hardness and that is applied with a compressive residual stress. As a result, the fatigue resistance of the male screw is improved and the bolt is effective for use in a portion where the male screw is subject to a repetitive stress.

Abstract: A substrate processing apparatus includes liquid tanks, a conveyor mechanism that dips multiple semiconductor substrates, arranged with provision of spaces, collectively into liquids in the liquid tanks, and water vapor spray nozzles disposed in gaps between the multiple semiconductor substrates so as to face rear surfaces of the semiconductor substrates. Heated water vapor is sprayed out of the water vapor spray nozzles onto the respective rear surfaces of the multiple semiconductor substrates prior to dipping the semiconductor substrates into the liquid in the liquid tanks.

Abstract: A structure for a gas turbine casing, capable of preventing gas from leaking when the structure is subjected to pressure. A structure for a gas turbine casing, divided by a horizontal plane at flange sections into two halves comprising an upper-half casing (10) and a lower-half casing (11). The structure is provided with bolts (12) which are disposed in the inner surfaces of the upper-half casing (10) and the lower-half casing (11) so as to bridge therebetween, upper nuts (13) which are disposed in the inner surface of the upper-half casing (10) and attached to the bolts (12), and lower nuts (14) which are disposed in the inner surface of the lower-half casing (11) and attached to the bolts (12).

Abstract: A bolt has a male screw with a surface hardening portion that has an increased surface hardness and that is applied with a compressive residual stress. The male screw is formed by cutting the bolt, and performing a process to provide at least on the surface of the male screw of the bolt the surface hardening portion that has increased hardness and that is applied with a compressive residual stress. As a result, the fatigue resistance of the male screw is improved and the bolt is effective for use in a portion where the male screw is subject to a repetitive stress.

Abstract: It is an apparatus for semiconductor device production in which a feed gas is fed into a chamber having a semiconductor wafer placed therein to deposit a thin film on the surface of the semiconductor wafer based on a catalyzed chemical reaction. It comprises the chamber for placing a semiconductor wafer therein, a feed gas supply means with which a feed gas which is a raw material for the thin film is sent into the chamber, and a gas-blowing means which has a gas-blowing opening through which the feed gas sent from the feed gas supply means is blown against the surface of the semiconductor wafer placed in the chamber. The gas-blowing means changes in the state of the gas-blowing opening according to the feed gas blowing position to thereby regulate the amount of the feed gas to be blown.

Abstract: According to an aspect of an embodiment, a method of manufacturing a semiconductor device has forming a mask including a first silicon nitride film over a semiconductor substrate, forming a trench in a surface of the semiconductor substrate using the mask, forming a silicon oxide film over the mask to embed the silicon oxide film in the trench, performing a first nitriding treatment to selectively convert a portion of the silicon oxide film above the trench into an oxynitride film, performing a second nitriding treatment of the silicon oxide and oxynitride film to form a second silicon nitride film, and planarizing the first silicon nitride film and second silicon nitride film.

Abstract: The present invention provides a surface hardening portion 11 that has increased surface hardness and that is applied with a compressive residual stress, at least on the surface of a male screw 10 of a bolt 1. The present invention includes the steps of cutting to form the male screw 10 of the bolt 1, and processing to provide at least on the surface of the male screw 10 of the bolt 1 the surface hardening portion 11 that has increased hardness and that is applied with a compressive residual stress. As a result, the present invention can improve the fatigue resistance of the male screw 10 and the bolt is effective as a bolt to be used in a portion where the male screw 10 is subject to a repetitive stress.

Abstract: A substrate processing apparatus includes liquid tanks, a conveyor mechanism that dips multiple semiconductor substrates, arranged with provision of spaces, collectively into liquids in the liquid tanks, and water vapor spray nozzles disposed in gaps between the multiple semiconductor substrates so as to face rear surfaces of the semiconductor substrates. Heated water vapor is sprayed out of the water vapor spray nozzles onto the respective rear surfaces of the multiple semiconductor substrates prior to dipping the semiconductor substrates into the liquid in the liquid tanks.

Abstract: A pneumatic radial tire, comprising: a carcass toroidally extending across between a pair of bead cores; an outer side belt layer provided outside of the carcass in a radial direction, in which a plurality of cords extending in a direction inclined with respect to a tire equatorial plane are buried in covering rubber; an inner side belt layer provided between the outer side belt layer and the carcass, in which a plurality of cords, made of the same material as that of the cords of the outer side belt layer, and extending in a direction crossing the cords of the outer side belt layer, are buried in covering rubber; and a tread provided outside of the outer side belt layer in the radial direction; wherein a total strength of the outer side belt layer is larger than a total strength of the inner side belt layer, is provided.

Abstract: The present invention provides a hollow structure with at least one flange which can eliminate the possibility of creating crackings due to the thermal fatigue, thereby improving the durability thereof. A hollow structure with an flange according to the present invention includes at least one annular flange fixedly attached around the hollow structure which has a temperature gradient in the direction of the thickness of the wall thereof, wherein said at least one annular flange including an outer portion formed of a metal material having a coefficient of linear expansion greater than that of the metal material forming another portion of said at least one annular flange.

Abstract: The present invention provides a hollow structure with at least one flange which can eliminate the possibility of creating crackings due to the thermal fatigue, thereby improving the durability thereof. A hollow structure with an flange according to the present invention includes at least one annular flange fixedly attached around the hollow structure which has a temperature gradient in the direction of the thickness of the wall thereof, wherein said at least one annular flange including an outer portion formed of a metal material having a coefficient of linear expansion greater than that of the metal material forming another portion of said at least one annular flange.

Abstract: Cooling air passages are formed in the wall of an exhaust casing connected to a turbine casing of a gas turbine. Low pressure air extracted from the low pressure stage of an air compressor of the gas turbine is supplied to the cooling air passage from the portion near the downstream end of the exhaust casing. Cooling air flows through the cooling air passage toward the upstream end of the exhaust casing and then flows into an annular cavity formed in the turbine casing near the portion corresponding to the last turbine stage. Therefore, the metal temperature of the exhaust casing near the upstream end (near the joint between the exhaust casing and the turbine casing) is lowered by the cooling air and, as cooling air of a relatively high temperature is supplied to the cavity in the turbine casing, the metal temperature of the turbine casing near the downstream end becomes higher than that provided by a conventional cooling system.

Abstract: A gas turbine moving blade is provided which prevents occurrence of cracks caused by thermal stresses due to temperature differences between a blade and a platform while the gas turbine is being stopped. During steady operation time of the moving blade, cooling air enters cooling passages to flow through other cooling passages for cooling the blade, and then to flow out of the blade. A recessed portion having a smooth curved surface is provided in the platform near a blade fitting portion on the blade trailing edge side. A fillet of the blade fitting portion on the blade trailing edge side has a curved surface with curvature larger than that of a conventional blade fitting portion. A hub slot below the fillet, for blowing air, has a cross sectional area larger than other slots of the blade trailing edge. A thermal barrier coating is applied to the blade surface.

Abstract: Cooling air passages are formed in the wall of an exhaust casing connected to a turbine casing of a gas turbine. Low pressure air extracted from the low pressure stage of an air compressor of the gas turbine is supplied to the cooling air passage from the portion near the downstream end of the exhaust casing. Cooling air flows through the cooling air passage toward the upstream end of the exhaust casing and then flows into an annular cavity formed in the turbine casing near the portion corresponding to the last turbine stage. Therefore, the metal temperature of the exhaust casing near the upstream end (near the joint between the exhaust casing and the turbine casing) is lowered by the cooling air and, as cooling air of a relatively high temperature is supplied to the cavity in the turbine casing, the metal temperature of the turbine casing near the downstream end becomes higher than that provided by a conventional cooling system.

Abstract: Gas turbine moving blade is improved so as to prevent occurrence of cracks caused by thermal stresses due to temperature differences between blade and platform when gas turbine is stopped. In steady operation time of moving blade (20), cooling air (40 to 43) enters cooling passages (23 to 26) to flow through cooling passages (23a, 24a to 24c, 25a to 25c) for cooling the blade (20) to then flow out of the blade (20). Recessed portion (1) having smooth curved surface is provided in platform (22) near blade fitting portion on blade trailing edge side. Fillet (R) of the blade fitting portion on the blade trailing edge side is formed with curved surface having curvature larger than conventional case. Hub slot below the fillet (R) for blowing air is formed having slot cross sectional area larger than other slots of blade trailing edge. TBC is applied to blade (20) surface.

Abstract: The present invention provides a stationary blade of integrated segment construction, in which a thermal barrier coating can be applied to the whole blade surface and excessive stress can be avoided in a shroud. A plate seat connector is provided at each end face portion of an inside shroud and an outside shroud attached to outside and inside ends of gas turbine stationary blade. Several stationary blades are integrated by joining the plate seat connectors of the adjacent shrouds by means of bolts and nuts to provide a stationary blade of integrated segment construction.

Abstract: Stress occurring in a moving blade in a gas turbine stopping process is decreased. Time t1 is load decrease start or fuel throttling start, time t2 is no load operation start, time t3 is fuel shut-off and time t4 is a time of largest stress. A 4/4 load maintained until t1 decreases gradually to a 0/4 load at t2, which is then maintained until t3 and then decreases further. The rotational speed is the rated speed until t2, at which point it is controlled to be decreased gradually to about 60% of the rated rotational speed at t3. The metal differential temperature between a moving blade point A and a platform point B is constant until t1 and is then decreased slightly between t1 and t2 and between t2 and t3. Differential temperature &Dgr;t, largest after t3, occurs at t4.