Patents by Inventor Yukihiro KAMADA

Yukihiro KAMADA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure sensor
    Patent number: 11940347
    Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.
    Type: Grant
    Filed: October 22, 2021
    Date of Patent: March 26, 2024
    Assignees: DENSO CORPORATION, NAGANO KEIKI CO., LTD.
    Inventors: Hiroshi Kodama, Naoki Yoshida, Kaori Miyashita, Eiji Takeda, Nobuaki Yamada, Yoshihiro Tomomatsu, Yasushi Yanagisawa, Yusuke Midorikawa, Shirou Kamanaru, Kenichi Yokoyama, Inao Toyoda, Hisayuki Takeuchi, Naohisa Niimi, Masao Takahashi, Yasutake Ura, Kouji Asano, Yukihiro Kamada
  • PRESSURE SENSOR
    Publication number: 20220042868
    Abstract: A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.
    Type: Application
    Filed: October 22, 2021
    Publication date: February 10, 2022
    Inventors: Hiroshi KODAMA, Naoki YOSHIDA, Kaori MIYASHITA, Eiji TAKEDA, Nobuaki YAMADA, Yoshihiro TOMOMATSU, Yasushi YANAGISAWA, Yusuke MIDORIKAWA, Shirou KAMANARU, Kenichi YOKOYAMA, Inao TOYODA, Hisayuki TAKEUCHI, Naohisa NIIMI, Masao TAKAHASHI, Yasutake URA, Kouji ASANO, Yukihiro KAMADA