Abstract: A method for manufacturing a compressor scroll that appropriately impinges cavitation bubbles on target regions of a scroll. The method includes the step of water jet peening by jetting cavitation bubbles generated underwater by a water jet at a first side of an end plate (13A) of the scroll (13), with a center (P1, P2, P3) of the cavitation bubbles being offset from a center (O) of the spiral shape of a wall portion (13B) on the end plate (13A) and the step portion (13Aa) and the stepped portion (13Ba) positioned at an outer peripheral portion of the cavitation bubbles (C).

Abstract: A method for manufacturing a compressor scroll that appropriately impinges cavitation bubbles on target regions of a scroll. The method includes the step of water jet peening by jetting cavitation bubbles generated underwater by a water jet at a first side of an end plate (13A) of the scroll (13), with a center (P1, P2, P3) of the cavitation bubbles being offset from a center (O) of the spiral shape of a wall portion (13B) on the end plate (13A) and the step portion (13Aa) and the stepped portion (13Ba) positioned at an outer peripheral portion of the cavitation bubbles (C).

Abstract: The invention relates to a method for forming a multilayer thin film and an apparatus thereof, which are able to form a thin layer at an accuracy of 0.5 nanometers or less on at least a specified layer during formation on a substrate (W) and to increase the yield of multilayer thin film products. X-rays are irradiated from X-ray irradiating means (6) onto the surface of a multilayer thin film during formation on the substrate (W) at angles from 0 to 1.5 degrees, and the obtained reflected X-rays are measured by X-ray measuring means (7) while varying the incident angle &thgr;, wherein reflectivity curve depicting the intensities of the reflected X-rays are obtained with respect to the scattering angle 2&thgr;, and the reflectivity curve, whose scattering angles exist in a range of 0 to 1 degree, of the reflectivity curve is analyzed.

Abstract: A light beam target for light beam shooting and apparatus employing it are disclosed. The light beam target has a light transparent target plate, stripe-like first and second X- and Y-axis photoelectric conversion elements and a compensating photoelectric conversion element disposed on the back of the target plate. When a light beam is projected onto the target plate, the first and second X- and Y-axis photoelectric conversion elements provide first and second X- and Y-axis electric signals corresponding to the position of the center of the light beam on the target plate. The apparatus using such light beam target has a circuit for producing X- and Y-axis light beam center indicating signals indicative of the position of the center of the light beam on the target plate based on the first and second X- and Y-axis electric signals and a device for displaying on an indicator plate the position of the center of the light beam on the target plate.