Patents by Inventor Yukihiro Okeda

Yukihiro Okeda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5355023
    Abstract: A part of a polycrystalline silicon film forming a grounding line in a memory cell of a high-resistance load type SRAM, located immediately below a contact hole for connection between a polysilicon power supply line part and an aluminum power supply line part, is separated and isolated from the remaining part of the polycrystalline silicon film to form an island-like part. The contact hole extends through an interlayer insulating film below the aluminum power supply line part, the polysilicon power supply line part and another interlayer insulating film above the island part, and reaches the island part, whereby the aluminum power supply line part contacts even the island part through the contact hole. The island part also contacts the polysilicon power supply line part through another contact hole, whereby low-resistance contact can be obtained between the aluminum and polysilicon power supply line parts through the island part.
    Type: Grant
    Filed: May 28, 1993
    Date of Patent: October 11, 1994
    Assignee: Nippon Steel Corporation
    Inventors: Yugo Tomioka, Yukihiro Okeda, Yasuo Sato