Abstract: A vibration measurement method for a moving part is a vibration measurement method in which vibration of a moving part is measured using a first inertial sensor. The method includes: performing measurement by the first inertial sensor in a state where the moving part is resonating, driven by a drive unit which drives the moving part; and finding a magnitude of vibration of the moving part, based on an output from the first inertial sensor. An example of the moving part may be a plurality of arms or the like provided in such a way as to be able to rotate about a rotation axis.

Abstract: A robot system includes a robot having a base, an arm supported by the base, and a force detection unit provided in the base and detecting a first force applied to the arm, and a control unit that controls motion of the robot. The control unit performs force control of the arm and deceleration of the arm according to contact between the robot and an object based on output of the force detection unit.

Abstract: A control apparatus includes a processor that is configured to control a robot including an arm and a force detector detecting a force applied to the arm, wherein the processor is configured to control the arm in a first control mode in which the arm is moved in a first direction when a direction of a force detected by the force detector is the first direction and a second control mode in which the arm is moved in a second direction different from the first direction when the direction of the force detected by the force detector is the first direction in teaching of the robot, and select the first control mode or the second control mode according to input by a user.

Abstract: A vibration measurement method for a moving part is a vibration measurement method in which vibration of a moving part is measured using a first inertial sensor. The method includes: performing measurement by the first inertial sensor in a state where the moving part is resonating, driven by a drive unit which drives the moving part; and finding a magnitude of vibration of the moving part, based on an output from the first inertial sensor. An example of the moving part may be a plurality of arms or the like provided in such a way as to be able to rotate about a rotation axis.

Abstract: A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge thereof, and a third thick section provided along a third outer edge thereof. When a maximum size of the second thick section in the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 ?m or smaller.

Abstract: A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge, and a third thick section provided along another first outer edge. An inclined outer edge section that intersects with each of an X axis and a Z? axis is provided in a tip section of the piezoelectric substrate.

Abstract: A resonator element includes a piezoelectric substrate that includes a vibration portion, and a thick portion which is integrally formed with an outer edge excluding a partial outer edge in an outer edge of the vibration portion and which is thicker than the vibration portion, and a pair of excitation electrodes that are respectively provided on a first main surface and a second main surface of a vibration region which are in front and rear relationships. In addition, the piezoelectric substrate includes first and second beam portions that are provided along a fourth side of the vibration portion.

Abstract: A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge, and a third thick section provided along another first outer edge. An inclined outer edge section that intersects with each of an X axis and a Z? axis is provided in a tip section of the piezoelectric substrate.

Abstract: A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge thereof, and a third thick section provided along a third outer edge thereof. When a maximum size of the second thick section in the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 ?m or smaller.

Abstract: A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge, and a third thick section provided along another first outer edge. An inclined outer edge section that intersects with each of an X axis and a Z? axis is provided in a tip section of the piezoelectric substrate.

Abstract: A resonator element includes a piezoelectric substrate that includes a vibration portion, and a thick portion which is integrally formed with an outer edge excluding a partial outer edge in an outer edge of the vibration portion and which is thicker than the vibration portion, and a pair of excitation electrodes that are respectively provided on a first main surface and a second main surface of a vibration region which are in front and rear relationships. In addition, the piezoelectric substrate includes first and second beam portions that are provided along a fourth side of the vibration portion.

Abstract: A vibration gyro sensor, including: a vibrating element; a pair of drive electrodes for driving the vibrating element; at least two detection electrodes for detecting Coriolis force applied to the vibrating element; a monitor circuit coupled with one of the pair of the drive electrodes, so as to output a monitor signal; a drive circuit for amplifying the monitor signal so as to output the amplified signal to the other of the pair of drive electrode; a differential amplifier circuit for differentially amplifying at least two signals obtained from the detection electrodes of the vibrating element, so as to output a differential amplified signal; a synchronous detection circuit for synchronously detecting the differential amplified signal with respect to the monitor signal, so as to output a detected signal; a filter circuit for outputting a filtered signal in which a noise of the detected signal is removed; and a ratiometric circuit which receives the filtered signal varied in proportion to a variation of a pow

Abstract: A vibration gyro sensor, including: a vibrating element; a pair of drive electrodes for driving the vibrating element; at least two detection electrodes for detecting Coriolis force applied to the vibrating element; a monitor circuit coupled with one of the pair of the drive electrodes, so as to output a monitor signal; a drive circuit for amplifying the monitor signal so as to output the amplified signal to the other of the pair of drive electrode; a differential amplifier circuit for differentially amplifying at least two signals obtained from the detection electrodes of the vibrating element, so as to output a differential amplified signal; a synchronous detection circuit for synchronously detecting the differential amplified signal with respect to the monitor signal, so as to output a detected signal; a filter circuit for outputting a filtered signal in which a noise of the detected signal is removed; and a ratiometric circuit which receives the filtered signal varied in proportion to a variation of a pow

Abstract: A vibrating gyro element that is formed of a piezoelectric material having a trigonal crystal structure and having a trigonal axis with respect to the Y-axis, includes a base portion, a detection arm extending in the Y-axis direction from one side of the base portion, and a pair of drive arms extending from the detection arm. One of the pair of drive arms extends in a direction at an angle of substantially +120 degrees with respect to the Y-axis direction. The other of the pair of drive arms extends in a direction at an angle of substantially ?120 degrees with respect to the Y-axis direction. The drive arms exist on substantially the same plane as the base portion and the detection arm.

Abstract: To make a substantial mounting area smaller. A piezoelectric resonator has a piezoelectric resonator element accommodated in a package. The piezoelectric resonator element includes a pair of connection electrodes which are connected to excitation electrodes. The respective connection electrodes are joined to mount electrodes formed in the package. The piezoelectric resonator includes four external electrodes at the outer surface of the bottom of the package. The external electrodes disposed along the shorter latus of the package on one side in the lengthwise direction thereof are electrically connected with the mount electrodes to which the respective connection electrodes of the piezoelectric resonator element are connected.

Abstract: To provide a piezoelectric oscillator in which, even after a first package and a second package are bonded to each other, the connection state can be easily observed externally, so that testability can be enhanced, and connection failure can be easily found out to perform a repair. A piezoelectric oscillator includes a first package housing a piezoelectric resonator element therein and having external terminal portions connected to excitation electrodes of the piezoelectric resonator element, and a second package housing an oscillating circuit element, the first package being superposed on and fixed to the second package. Herein, in the second package, the oscillating circuit element, which is connected to a lead frame, is molded out of resin, and connection terminal portions and mounting terminals formed of the lead frame are exposed at the second package.

Abstract: The invention provides a stabilized frequency characteristic over a wide temperature range. A quartz resonating piece is provided such that an electrical axis of quartz corresponds to an X axis, a mechanical axis of the quartz corresponds to a Y axis, and an optical axis of the quartz corresponds to a Z axis. The quartz resonating piece includes a quartz plate having a side that is parallel to an X?axis set by clockwise rotation of the X axis around the Z axis by an angle equal to or greater than ?5.0° and less than ?1.0° or by an angle greater than +1.0° and equal to or less than 15.9°, and another side that is parallel to a Z? axis set by clockwise rotation of the Z axis around the X? axis by an angle in a range from 34.6° to 35.1° inclusive; or a quartz plate having a side that is parallel to the X? axis set by clockwise rotation of the X axis around the Z axis by an angle in a range from ?15.9° to ?5.

Abstract: To make a substantial mounting area smaller. A piezoelectric resonator has a piezoelectric resonator element accommodated in a package. The piezoelectric resonator element includes a pair of connection electrodes which are connected to excitation electrodes. The respective connection electrodes are joined to mount electrodes formed in the package. The piezoelectric resonator includes four external electrodes at the outer surface of the bottom of the package. The external electrodes disposed along the shorter latus of the package on one side in the lengthwise direction thereof are electrically connected with the mount electrodes to which the respective connection electrodes of the piezoelectric resonator element are connected.

Abstract: To provide a piezoelectric oscillator in which, even after a first package and a second package are bonded to each other, the connection state can be easily observed externally, so that testability can be enhanced, and connection failure can be easily found out to perform a repair. A piezoelectric oscillator includes a first package housing a piezoelectric resonator element therein and having external terminal portions connected to excitation electrodes of the piezoelectric resonator element, and a second package housing an oscillating circuit element, the first package being superposed on and fixed to the second package. Herein, in the second package, the oscillating circuit element, which is connected to a lead frame, is molded out of resin, and connection terminal portions and mounting terminals formed of the lead frame are exposed at the second package.

Abstract: The invention provides a stabilized frequency characteristic over a wide temperature range. A quartz resonating piece is provided such that an electrical axis of quartz corresponds to an X axis, a mechanical axis of the quartz corresponds to a Y axis, and an optical axis of the quartz corresponds to a Z axis. The quartz resonating piece includes a quartz plate having a side that is parallel to an X′ axis set by clockwise rotation of the X axis around the Z axis by an angle equal to or greater than −5.0° and less than −1.0° or by an angle greater than +1.0° and equal to or less than 15.9°, and another side that is parallel to a Z′ axis set by clockwise rotation of the Z axis around the X′ axis by an angle in a range from 34.6° to 35.1° inclusive; or a quartz plate having a side that is parallel to the X′ axis set by clockwise rotation of the X axis around the Z axis by an angle in a range from −15.9° to −5.